Abstract
By detecting the resonant frequency shift caused by an attached particle before and after film deposition, the Young's modulus and either mass density or thickness of a patterned thin film can be determined. Furthermore, for a film characterization, the particle mass does not need to be known and its attachment position can be either measured or calculated from consecutive resonant frequency shifts: two for bridge and three for cantilever. The applicability of mass sensors in film characterization has been confirmed by comparing predictions with recent experiments.
| Original language | English |
|---|---|
| Article number | 083102 |
| Journal | Applied Physics Letters |
| Volume | 104 |
| Issue number | 8 |
| DOIs | |
| Publication status | Published - 2014 Jan 1 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)
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Stachiv, I., Vokoun, D., & Jeng, Y. R. (2014). Measurement of Young's modulus and volumetric mass density/thickness of ultrathin films utilizing resonant based mass sensors. Applied Physics Letters, 104(8), [083102]. https://doi.org/10.1063/1.4866417