Abstract
By detecting the resonant frequency shift caused by an attached particle before and after film deposition, the Young's modulus and either mass density or thickness of a patterned thin film can be determined. Furthermore, for a film characterization, the particle mass does not need to be known and its attachment position can be either measured or calculated from consecutive resonant frequency shifts: two for bridge and three for cantilever. The applicability of mass sensors in film characterization has been confirmed by comparing predictions with recent experiments.
Original language | English |
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Article number | 083102 |
Journal | Applied Physics Letters |
Volume | 104 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2014 Jan 1 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)