Measurement of Young's modulus and volumetric mass density/thickness of ultrathin films utilizing resonant based mass sensors

Ivo Stachiv, David Vokoun, Yeau Ren Jeng

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

By detecting the resonant frequency shift caused by an attached particle before and after film deposition, the Young's modulus and either mass density or thickness of a patterned thin film can be determined. Furthermore, for a film characterization, the particle mass does not need to be known and its attachment position can be either measured or calculated from consecutive resonant frequency shifts: two for bridge and three for cantilever. The applicability of mass sensors in film characterization has been confirmed by comparing predictions with recent experiments.

Original languageEnglish
Article number083102
JournalApplied Physics Letters
Volume104
Issue number8
DOIs
Publication statusPublished - 2014 Jan 1

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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