Mechanical and Tribological Properties of NbTi-N _X and NbTi-N₁₂-CH Coatings Prepared Using Radio Frequency Magnetron Sputtering and Their Application for Micro-drills

Engineering & Materials Science

• Magnetron sputtering 100%
• Coatings 56%
• Mechanical properties 48%
• Wear of materials 27%
• X rays 14%
• Substrates 11%
• Crystalline materials 11%
• Photoelectron spectroscopy 9%
• Binding energy 8%
• Acetylene 7%
• Niobium 6%
• High speed steel 6%
• Diffraction 5%
• Titanium 5%
• Drilling 4%
• Hydrogen 4%
• Scanning electron microscopy 4%
• Hardness 4%
• Carbon 4%
• Flow rate 4%
• Friction 3%

Chemical Compounds

• Magnetron Sputtering 86%
• Wear Rate 20%
• Wear 20%
• Diffractometry 7%
• Friction Coefficient 5%
• Photoelectron Spectroscopy 5%
• Acetylene 4%
• Flow Kinetics 4%
• Nitrogen 3%
• Scanning Electron Microscopy 3%
• Hydrogen 2%
• Purity 2%
• Energy 2%
• Carbon Atom 2%
• Time 1%
• Surface 1%