TY - GEN
T1 - Mechanical properties characterization of PECVD nitride films with rapid thermal annealing using finite element simulation
AU - Chiang, Chih Yang
AU - Yan, Hong Yi
AU - Huang, Zhi Kai
AU - Chen, Kuo Shen
PY - 2011
Y1 - 2011
N2 - This paper presents the development of a new model for extracting elastic modulus from nanoindentation testing data and its subsequent application for deterimining the Young's modulus of plasma-enhanced chemical vapour deposited (PECVD) silicon nitride films after rapid thermal annealing (RTA), processed between 400 and 800°C. Primary test data indicate that the modulus varied significantly with different RTA temperatures. However, the traditional data reduction scheme cannot exclude the substrate effect and it results in depth-dependent modulus. In this work, the substrate effect can be significantly reduced by the proposed model and the accurate data reduction implies that it is possible to provide more understanding to accurate correlate the fabrication process parameters and the resulted mechanical behavior of thin films in the future.
AB - This paper presents the development of a new model for extracting elastic modulus from nanoindentation testing data and its subsequent application for deterimining the Young's modulus of plasma-enhanced chemical vapour deposited (PECVD) silicon nitride films after rapid thermal annealing (RTA), processed between 400 and 800°C. Primary test data indicate that the modulus varied significantly with different RTA temperatures. However, the traditional data reduction scheme cannot exclude the substrate effect and it results in depth-dependent modulus. In this work, the substrate effect can be significantly reduced by the proposed model and the accurate data reduction implies that it is possible to provide more understanding to accurate correlate the fabrication process parameters and the resulted mechanical behavior of thin films in the future.
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M3 - Conference contribution
AN - SCOPUS:81455148097
SN - 9781439871423
SN - 9781439871423
T3 - Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011
SP - 20
EP - 23
BT - Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011
T2 - Nanotechnology 2011: Advanced Materials, CNTs, Particles, Films and Composites - 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011
Y2 - 13 June 2011 through 16 June 2011
ER -