Mechanical Properties Characterizations of Elastomer Pads and Control of a 3-DOF Rubber-Bearing Stage

Yu Cheng Chen, Chi An Chen, Kuo Shen Chen, Yun Hui Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

As products are required with higher precision, vibration control becomes more important for precision machining and inspection. Controlled positioning stages with both fast positioning and relative vibration eliminated have been widely used as critical subsystems in precision manufacture and metrology. Recently, elastomeric bearings, which had been widely used in the seismic engineering, have been integrated into precision stage design due to their inherent stiffness anisotropy. With the incorporation of rubber bearing, stages can be designed to have the same function as these much larger compliant mechanisms-based designs. This provides possible advantages in the precision positioning. However, the behavior of elastomeric bearings depends on mechanical properties of materials, geometry, and operating conditions. It is important to perform essential characterization for fully taking the advantage of this approach. In this work, essential static and dynamic characterizations of elastomeric bearing structures are performed under different preloads and actuating frequencies. The stiffness, damping, and natural frequencies are evaluated. In parallel, a 3-DOF elastomeric bearing stage is design, realized, and controlled based on the characterized results. The experimental results indicate that it can achieve an 80 Hz controlling bandwidth and an 80 nm and 2urad travelling resolutions.

Original languageEnglish
Title of host publication2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages539-544
Number of pages6
ISBN (Electronic)9784907764609
DOIs
Publication statusPublished - 2018 Oct 15
Event57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018 - Nara, Japan
Duration: 2018 Sep 112018 Sep 14

Publication series

Name2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018

Other

Other57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018
CountryJapan
CityNara
Period18-09-1118-09-14

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Control and Optimization
  • Instrumentation

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