Abstract
As products are required with higher precision, vibration control becomes more important for precision machining and inspection. Controlled positioning stages with both fast positioning and relative vibration eliminated have been widely used as critical subsystems in precision manufacture and metrology. Recently, elastomeric bearings, which had been widely used in the seismic engineering, have been integrated into precision stage design due to their inherent stiffness anisotropy. With the incorporation of rubber bearing, stages can be designed to have the same function as these much larger compliant mechanisms-based designs. This provides possible advantages in the precision positioning. However, the behavior of elastomeric bearings depends on mechanical properties of materials, geometry, and operating conditions. It is important to perform essential characterization for fully taking the advantage of this approach. In this work, essential static and dynamic characterizations of elastomeric bearing structures are performed under different preloads and actuating frequencies. The stiffness, damping, and natural frequencies are evaluated. In parallel, a 3-DOF elastomeric bearing stage is design, realized, and controlled based on the characterized results. The experimental results indicate that it can achieve an 80 Hz controlling bandwidth and an 80 nm and 2urad travelling resolutions.
| Original language | English |
|---|---|
| Title of host publication | 2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 539-544 |
| Number of pages | 6 |
| ISBN (Electronic) | 9784907764609 |
| DOIs | |
| Publication status | Published - 2018 Oct 15 |
| Event | 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018 - Nara, Japan Duration: 2018 Sep 11 → 2018 Sep 14 |
Publication series
| Name | 2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018 |
|---|
Other
| Other | 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018 |
|---|---|
| Country | Japan |
| City | Nara |
| Period | 18-09-11 → 18-09-14 |
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All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Control and Optimization
- Instrumentation
Cite this
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Mechanical Properties Characterizations of Elastomer Pads and Control of a 3-DOF Rubber-Bearing Stage. / Chen, Yu Cheng; Chen, Chi An; Chen, Kuo-Shen; Liu, Yun Hui.
2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 539-544 8492707 (2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Mechanical Properties Characterizations of Elastomer Pads and Control of a 3-DOF Rubber-Bearing Stage
AU - Chen, Yu Cheng
AU - Chen, Chi An
AU - Chen, Kuo-Shen
AU - Liu, Yun Hui
PY - 2018/10/15
Y1 - 2018/10/15
N2 - As products are required with higher precision, vibration control becomes more important for precision machining and inspection. Controlled positioning stages with both fast positioning and relative vibration eliminated have been widely used as critical subsystems in precision manufacture and metrology. Recently, elastomeric bearings, which had been widely used in the seismic engineering, have been integrated into precision stage design due to their inherent stiffness anisotropy. With the incorporation of rubber bearing, stages can be designed to have the same function as these much larger compliant mechanisms-based designs. This provides possible advantages in the precision positioning. However, the behavior of elastomeric bearings depends on mechanical properties of materials, geometry, and operating conditions. It is important to perform essential characterization for fully taking the advantage of this approach. In this work, essential static and dynamic characterizations of elastomeric bearing structures are performed under different preloads and actuating frequencies. The stiffness, damping, and natural frequencies are evaluated. In parallel, a 3-DOF elastomeric bearing stage is design, realized, and controlled based on the characterized results. The experimental results indicate that it can achieve an 80 Hz controlling bandwidth and an 80 nm and 2urad travelling resolutions.
AB - As products are required with higher precision, vibration control becomes more important for precision machining and inspection. Controlled positioning stages with both fast positioning and relative vibration eliminated have been widely used as critical subsystems in precision manufacture and metrology. Recently, elastomeric bearings, which had been widely used in the seismic engineering, have been integrated into precision stage design due to their inherent stiffness anisotropy. With the incorporation of rubber bearing, stages can be designed to have the same function as these much larger compliant mechanisms-based designs. This provides possible advantages in the precision positioning. However, the behavior of elastomeric bearings depends on mechanical properties of materials, geometry, and operating conditions. It is important to perform essential characterization for fully taking the advantage of this approach. In this work, essential static and dynamic characterizations of elastomeric bearing structures are performed under different preloads and actuating frequencies. The stiffness, damping, and natural frequencies are evaluated. In parallel, a 3-DOF elastomeric bearing stage is design, realized, and controlled based on the characterized results. The experimental results indicate that it can achieve an 80 Hz controlling bandwidth and an 80 nm and 2urad travelling resolutions.
UR - http://www.scopus.com/inward/record.url?scp=85056730865&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85056730865&partnerID=8YFLogxK
U2 - 10.23919/SICE.2018.8492707
DO - 10.23919/SICE.2018.8492707
M3 - Conference contribution
T3 - 2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018
SP - 539
EP - 544
BT - 2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018
PB - Institute of Electrical and Electronics Engineers Inc.
ER -