Mechanical, tribological, anti-corrosion and anti-glass sticking properties of high-entropy TaNbSiZrCr carbide coatings prepared using radio-frequency magnetron sputtering

Engineering & Materials Science

• Magnetron sputtering 100%
• Carbides 72%
• Entropy 63%
• Glass 59%
• Corrosion 56%
• Coatings 56%
• Flow rate 25%
• Annealing 16%
• Corrosion resistance 15%
• Hardness 6%
• Carbon 6%
• Wear of materials 6%
• Substrates 5%
• Microstructure 5%
• Mechanical properties 5%

Physics & Astronomy

• carbides 73%
• corrosion 67%
• radio frequencies 64%
• magnetron sputtering 62%
• entropy 54%
• coatings 50%
• glass 43%
• flow velocity 26%
• corrosion resistance 17%
• annealing 10%
• performance 7%
• hardness 6%
• mechanical properties 5%
• carbon 5%

Chemical Compounds

• Magnetron Sputtering 86%
• Flow Kinetics 25%
• Annealing 13%
• Plate Glass 10%
• Wear Rate 10%
• Corrosion Resistance 7%
• Glass 5%
• Microstructure 5%
• Resistance 5%