A dynamic source effect was found to accelerate the plume expansion velocity much higher than that from a conventional free-expansion model. A self-similar theory and a hydrodynamic model are developed to study this effect, which may help to explain experimentally observed high front expansion velocity. Background gas can also affect the kinetic energies. High background gas may cause the ablated materials to go backward. Experimentally observed plume splitting is also discussed.
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 1996 Jan 1|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films