Mechanisms of circular defects for shallow trench isolation oxide deposition

Jin Kun Lan, Ying Lang Wang, Chuan Pu Liu, Chuen Guang Chao, Chyung Ay, Chi Wen Liu, Yi Lung Cheng

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)2098-2104
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number5
DOIs
Publication statusPublished - 2003

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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