MEMS-based benzene gas sensor with WO 3 thin film

Chia Yen Lee, Chin Lung Chang, Chiu Feng Lin, Chyuan Yow Tseng, Lung-Ming Fu

Research output: Contribution to journalArticlepeer-review


This study presents a micro-electro-mechanical systems (MEMS) - based benzene gas sensor with WO 3 thin film, which incorporates WO 3 sensing layer and Pt electrodes (for heating and sensing). The WO 3 is deposited by sputtering process and then annealed to increase the cavity to enhance its sensitivity. The Pt electrodes are electron-beam evaporated on the sensing layer. The proposed gas sensor is tested at different temperatures (200°C, 250°C and 300°C) to investigate the relation between the benzene concentration and resistivity of the sensing layer.

Original languageEnglish
Pages (from-to)389-393
Number of pages5
JournalGongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices
Issue number2
Publication statusPublished - 2008 Apr 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Materials Chemistry
  • Electrical and Electronic Engineering


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