MEMS-based humidity sensor based on thiol-coated gold nanoparticles

Che Hsin Lin, Lung-Ming Fu, Chia Yen Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A MEMS-based humidity sensor is proposed comprising thiol-coated gold nanoparticles (AuNPs) deposited on a glass substrate with aluminum interdigitated electrodes (IDEs). In the proposed device, the humidity is measured by monitoring the change in the device resistance as the water molecules are absorbed by the AuNPs. A highly sensitive sensing performance is obtained as a result of the large surface area of the AuNPs and the hydrophilic nature of the thiol coating. The experimental results show that the sensor has a time response of 10 s when the humidity is changed abruptly from 30%R.H. to 80%R.H. and a recovery time of 5 s when the humidity is restored to 30%R.H. In addition, it is shown that the sensor has a sensitivity of 2.83 kΩ/%R.H. over the humidity range of 20 ∼ 90%R.H. Finally, the sensor is shown to have good reliability (i.e., ±1.2%R.H.) over an extended period of 72 h.

Original languageEnglish
Title of host publication9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages191-194
Number of pages4
ISBN (Electronic)9781479947270
DOIs
Publication statusPublished - 2014 Sep 23
Event9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 - Waikiki Beach, United States
Duration: 2014 Apr 132014 Apr 16

Publication series

Name9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

Other

Other9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
CountryUnited States
CityWaikiki Beach
Period14-04-1314-04-16

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'MEMS-based humidity sensor based on thiol-coated gold nanoparticles'. Together they form a unique fingerprint.

Cite this