TY - GEN
T1 - MEMS-based humidity sensor based on thiol-coated gold nanoparticles
AU - Lin, Che Hsin
AU - Fu, Lung Ming
AU - Lee, Chia Yen
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2014/9/23
Y1 - 2014/9/23
N2 - A MEMS-based humidity sensor is proposed comprising thiol-coated gold nanoparticles (AuNPs) deposited on a glass substrate with aluminum interdigitated electrodes (IDEs). In the proposed device, the humidity is measured by monitoring the change in the device resistance as the water molecules are absorbed by the AuNPs. A highly sensitive sensing performance is obtained as a result of the large surface area of the AuNPs and the hydrophilic nature of the thiol coating. The experimental results show that the sensor has a time response of 10 s when the humidity is changed abruptly from 30%R.H. to 80%R.H. and a recovery time of 5 s when the humidity is restored to 30%R.H. In addition, it is shown that the sensor has a sensitivity of 2.83 kΩ/%R.H. over the humidity range of 20 ∼ 90%R.H. Finally, the sensor is shown to have good reliability (i.e., ±1.2%R.H.) over an extended period of 72 h.
AB - A MEMS-based humidity sensor is proposed comprising thiol-coated gold nanoparticles (AuNPs) deposited on a glass substrate with aluminum interdigitated electrodes (IDEs). In the proposed device, the humidity is measured by monitoring the change in the device resistance as the water molecules are absorbed by the AuNPs. A highly sensitive sensing performance is obtained as a result of the large surface area of the AuNPs and the hydrophilic nature of the thiol coating. The experimental results show that the sensor has a time response of 10 s when the humidity is changed abruptly from 30%R.H. to 80%R.H. and a recovery time of 5 s when the humidity is restored to 30%R.H. In addition, it is shown that the sensor has a sensitivity of 2.83 kΩ/%R.H. over the humidity range of 20 ∼ 90%R.H. Finally, the sensor is shown to have good reliability (i.e., ±1.2%R.H.) over an extended period of 72 h.
UR - http://www.scopus.com/inward/record.url?scp=84908617265&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84908617265&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2014.6908788
DO - 10.1109/NEMS.2014.6908788
M3 - Conference contribution
AN - SCOPUS:84908617265
T3 - 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
SP - 191
EP - 194
BT - 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
Y2 - 13 April 2014 through 16 April 2014
ER -