MEMS-based MHz silicon ultrasonic nozzles for production of monodisperse drops

Y. L. Song, Chih H. Cheng, Ning Wang, Shirley C. Tsai, Yuan F. Chou, Ching T. Lee, Chen S. Tsai

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This paper reports production of 4.5 μm-diameter monodisperse water drops using a micro electro-mechanical system (MEMS)-based 1 MHz 3-Fourier horn ultrasonic nozzle. The required electrical drive voltage for atomization was 6.5 V at 964+1 kHz that is in good agreements with the values obtained by impedance measurement and by the three-dimensional (3-D) simulation using a commercial finite element analysis program. Such small diameter drops with geometrical standard deviation (GSD) as small as 1.2 and 90% inhale-able fine particle fraction (<5.8 μm-diameter) were achieved in ultrasonic atomization for the first time. Therefore, the MEMS-based MHz ultrasonic nozzles should have potential application to targeted delivery of reproducible doses of medicine to the respiratory system.

Original languageEnglish
Title of host publicationMicroelectromechanical Systems - Materials and Devices
Number of pages6
Publication statusPublished - 2008 Jun 30
EventMicroelectromechanical Systems - Materials and Devices - Boston, MA, United States
Duration: 2007 Nov 262007 Nov 28

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


OtherMicroelectromechanical Systems - Materials and Devices
Country/TerritoryUnited States
CityBoston, MA

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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