@inproceedings{c502e01648f5400981797be25af4ab9a,
title = "MEMS-based MHz silicon ultrasonic nozzles for production of monodisperse drops",
abstract = "This paper reports production of 4.5 μm-diameter monodisperse water drops using a micro electro-mechanical system (MEMS)-based 1 MHz 3-Fourier horn ultrasonic nozzle. The required electrical drive voltage for atomization was 6.5 V at 964+1 kHz that is in good agreements with the values obtained by impedance measurement and by the three-dimensional (3-D) simulation using a commercial finite element analysis program. Such small diameter drops with geometrical standard deviation (GSD) as small as 1.2 and 90% inhale-able fine particle fraction (<5.8 μm-diameter) were achieved in ultrasonic atomization for the first time. Therefore, the MEMS-based MHz ultrasonic nozzles should have potential application to targeted delivery of reproducible doses of medicine to the respiratory system.",
author = "Song, {Y. L.} and Cheng, {Chih H.} and Ning Wang and Tsai, {Shirley C.} and Chou, {Yuan F.} and Lee, {Ching T.} and Tsai, {Chen S.}",
year = "2008",
language = "English",
isbn = "9781558999909",
series = "Materials Research Society Symposium Proceedings",
pages = "305--310",
booktitle = "Microelectromechanical Systems - Materials and Devices",
note = "Microelectromechanical Systems - Materials and Devices ; Conference date: 26-11-2007 Through 28-11-2007",
}