MEMS flexible thermal flow sensor for measurement of boundary layer separation

Jui Ming Yu, Tzong Shyng Leu, Jiun Jih Miau, Shih Jiun Chen

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


Micro-electro-mechanical systems (MEMS) thermal flow sensors featured with high spatial resolutions, fast frequency response and minimal interference with fluid flow have been applied widely in boundary-layer studies and aerodynamic flow sensing and control due to the inherent outstanding performances. In this study, MEMS thermal flow sensors were designed and fabricated on a flexible skin using the MEMS technology. The dimension of a single sensing element was 200 μm × 260 μm, which had a resistance of about 200 Ω after annealing. By configuring thermal flow sensors in either a single thermal flow sensor and a thermal tuft sensor, separation points of a two-dimensional (2D) LS(1) 0417 airfoil at various angles of attack could be precisely detected. The experimental results show good agreement with the hot wire sensor and particle traced flow visualization in detecting the separation point on the suction surface of the airfoil.

Original languageEnglish
Article number1650177
JournalModern Physics Letters B
Issue number15
Publication statusPublished - 2016 Jun 10

All Science Journal Classification (ASJC) codes

  • Statistical and Nonlinear Physics
  • Condensed Matter Physics


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