MEMS residual stress characterization: Methodology and perspective

Kuo Shen Chen, Kuang Shun Ou

Research output: Chapter in Book/Report/Conference proceeding › Chapter

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'MEMS residual stress characterization: Methodology and perspective'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds