Mems thermal film sensors for unsteady flow measurement

J. J. Miau; T. S. Leu; J. M. Yu; J. K. Tu; C. T. Wang; V. Lebiga; D. Mironov; A. Pak; V. Zinovyev; K. M. Chung

doi:10.1016/j.sna.2015.09.030

Mems thermal film sensors for unsteady flow measurement

J. J. Miau, T. S. Leu, J. M. Yu, J. K. Tu, C. T. Wang, V. Lebiga, D. Mironov, A. Pak, V. Zinovyev, K. M. Chung

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

Deposited on a flexible skin, self-made MEMS (Micro Electronically-Mechanical Systems) thermal film sensors were applied to a contoured wall surface for sensing unsteady flow behaviors. The sensors, each featuring a platinum sensing element 0.1 μm in thickness on a polyimide substrate 20 μm thick, were about 150-200 ohm at room temperature. The frequency response of the sensors could be up to 30 kHz when operating in constant temperature mode. In studying the unsteady flow behaviors, the flow information of interest was mainly the frequency contents of the real-time signals measured. In this paper, the three presented cases illustrate how the signals of the MEMS sensors could be used to explore the instantaneous behaviors of the unsteady flows.

Original language	English
Pages (from-to)	1-13
Number of pages	13
Journal	Sensors and Actuators, A: Physical
Volume	235
DOIs	https://doi.org/10.1016/j.sna.2015.09.030
Publication status	Published - 2015 Nov 1

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2015.09.030

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title = "Mems thermal film sensors for unsteady flow measurement",

abstract = "Deposited on a flexible skin, self-made MEMS (Micro Electronically-Mechanical Systems) thermal film sensors were applied to a contoured wall surface for sensing unsteady flow behaviors. The sensors, each featuring a platinum sensing element 0.1 μm in thickness on a polyimide substrate 20 μm thick, were about 150-200 ohm at room temperature. The frequency response of the sensors could be up to 30 kHz when operating in constant temperature mode. In studying the unsteady flow behaviors, the flow information of interest was mainly the frequency contents of the real-time signals measured. In this paper, the three presented cases illustrate how the signals of the MEMS sensors could be used to explore the instantaneous behaviors of the unsteady flows.",

author = "Miau, {J. J.} and Leu, {T. S.} and Yu, {J. M.} and Tu, {J. K.} and Wang, {C. T.} and V. Lebiga and D. Mironov and A. Pak and V. Zinovyev and Chung, {K. M.}",

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AU - Miau, J. J.

AU - Leu, T. S.

AU - Yu, J. M.

AU - Tu, J. K.

AU - Wang, C. T.

AU - Lebiga, V.

AU - Mironov, D.

AU - Pak, A.

AU - Zinovyev, V.

AU - Chung, K. M.

PY - 2015/11/1

Y1 - 2015/11/1

N2 - Deposited on a flexible skin, self-made MEMS (Micro Electronically-Mechanical Systems) thermal film sensors were applied to a contoured wall surface for sensing unsteady flow behaviors. The sensors, each featuring a platinum sensing element 0.1 μm in thickness on a polyimide substrate 20 μm thick, were about 150-200 ohm at room temperature. The frequency response of the sensors could be up to 30 kHz when operating in constant temperature mode. In studying the unsteady flow behaviors, the flow information of interest was mainly the frequency contents of the real-time signals measured. In this paper, the three presented cases illustrate how the signals of the MEMS sensors could be used to explore the instantaneous behaviors of the unsteady flows.

AB - Deposited on a flexible skin, self-made MEMS (Micro Electronically-Mechanical Systems) thermal film sensors were applied to a contoured wall surface for sensing unsteady flow behaviors. The sensors, each featuring a platinum sensing element 0.1 μm in thickness on a polyimide substrate 20 μm thick, were about 150-200 ohm at room temperature. The frequency response of the sensors could be up to 30 kHz when operating in constant temperature mode. In studying the unsteady flow behaviors, the flow information of interest was mainly the frequency contents of the real-time signals measured. In this paper, the three presented cases illustrate how the signals of the MEMS sensors could be used to explore the instantaneous behaviors of the unsteady flows.

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JO - Sensors and Actuators, A: Physical

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Mems thermal film sensors for unsteady flow measurement

Abstract

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