TY - GEN
T1 - Metallization on 3-D microstructures using spray coating for high performance micro direct methanol fuel cell (μDMFC)
AU - Houjou, Hiroaki
AU - Motokawa, Shinji
AU - Ishizuka, Masanori
AU - Mizuno, Jun
AU - Momma, Toshiyuki
AU - Osaka, Tetsuya
AU - Shoji, Shuichi
PY - 2005
Y1 - 2005
N2 - High efficient micro electrochemical devices are realized by the increase of the electrode surface areas keeping the chip size. Use of the 3-D electrodes instead of the planar electrodes is quite effective for this purpose. To realize a metal pattern on 3-D structures, spray coating method was utilized and the optimum condition to achieve good step coverage was observed. Good step coverage of photoresist was obtained on the obtuse corner formed by anisotropic wet etching of (100) silicon and even vertical comer formed by deep RIE. We applied this method to fabricate a high performance micro direct methanol fuel cell (μDMFC). The open circuit voltage of 548mV and the maximum power density of 0.72mW/cm2 were obtained at room temperature with 2M methanol.
AB - High efficient micro electrochemical devices are realized by the increase of the electrode surface areas keeping the chip size. Use of the 3-D electrodes instead of the planar electrodes is quite effective for this purpose. To realize a metal pattern on 3-D structures, spray coating method was utilized and the optimum condition to achieve good step coverage was observed. Good step coverage of photoresist was obtained on the obtuse corner formed by anisotropic wet etching of (100) silicon and even vertical comer formed by deep RIE. We applied this method to fabricate a high performance micro direct methanol fuel cell (μDMFC). The open circuit voltage of 548mV and the maximum power density of 0.72mW/cm2 were obtained at room temperature with 2M methanol.
UR - http://www.scopus.com/inward/record.url?scp=27544493268&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=27544493268&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2005.1497352
DO - 10.1109/SENSOR.2005.1497352
M3 - Conference contribution
AN - SCOPUS:27544493268
SN - 0780389948
SN - 9780780389946
T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
SP - 1437
EP - 1440
BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Y2 - 5 June 2005 through 9 June 2005
ER -