Method for evaluating reliance level of a virtual metrology system

Fan Tien Cheng, Yen Tung Chen, Yu Chuan Su, Deng Lin Zeng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

A method for evaluating reliance level of a virtual metrology system (VMS) is proposed. This method calculates a reliance index (RI) value between 0 and 1 by analyzing the process data of production equipment to decide if the virtual metrology result is reliable. A RI threshold is also defined in this method. If a RI value is higher than the threshold, the conjecture result is reliant; otherwise, the conjecture result needs to be further examined. In addition to the RI, the method also proposes process data similarity indexes (SIs). The SIs are defined to evaluate the degree of similarity between the input set of process data and those historical sets of process data used to establish the conjecture model. Two kinds of SIs are included in the method: global similarity index (GSI) and individual similarity index (ISI). Both the GSI and ISI are applied to assist the RI in gauging the reliance level and locating the key parameter(s) that cause major deviation, hence the VMS manufacturability problem is resolved. An illustrative example with 300-mm semiconductor foundry production equipment in Taiwan is demonstrated in this work. The real experimental results show that this method is applicable to the VMS of (such as semiconductor and TFT-LCD) production equipment.

Original languageEnglish
Title of host publication2007 IEEE International Conference on Robotics and Automation, ICRA'07
Pages1590-1596
Number of pages7
DOIs
Publication statusPublished - 2007 Nov 27
Event2007 IEEE International Conference on Robotics and Automation, ICRA'07 - Rome, Italy
Duration: 2007 Apr 102007 Apr 14

Publication series

NameProceedings - IEEE International Conference on Robotics and Automation
ISSN (Print)1050-4729

Other

Other2007 IEEE International Conference on Robotics and Automation, ICRA'07
CountryItaly
CityRome
Period07-04-1007-04-14

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Artificial Intelligence
  • Electrical and Electronic Engineering

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  • Cite this

    Cheng, F. T., Chen, Y. T., Su, Y. C., & Zeng, D. L. (2007). Method for evaluating reliance level of a virtual metrology system. In 2007 IEEE International Conference on Robotics and Automation, ICRA'07 (pp. 1590-1596). [4209315] (Proceedings - IEEE International Conference on Robotics and Automation). https://doi.org/10.1109/ROBOT.2007.363551