METHOD FOR MANUFACTURING AN OXIDE THIN FILM

Jow-Lay Huang (Inventor), Jen-Sue Chen (Inventor), Jih-Jen Wu (Inventor)

Research output: Patent

Abstract

A method for manufacturing an oxide thin film comprises: providing a coating material composed of a first precursor material, a fuel material and a solvent; coating the coating material on a substrate; and annealing the coated coating material on the substrate to convert the coated coating material into an oxide thin film.
Translated title of the contribution製造氧化物薄膜的方式
Original languageEnglish
Patent number8821967
Publication statusPublished - 1800

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