Methylamine growth of SiCN films using ECR-CVD

C. Y. Wen, J. J. Wu, H. J. Lo, L. C. Chen, K. H. Chen, S. T. Lin, Y. C. Yu, C. W. Wang, E. K. Lin

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


Dive into the research topics of 'Methylamine growth of SiCN films using ECR-CVD'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy