MgTiO3 (003) thin film deposited on sapphire (0001) by sputtering

Chu Yun Hsiao, Chuan Feng Shih, Chih Hua Chien, Cheng Liang Huang

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


This work demonstrates the epitaxy of ilmenite magnesium titanate (MgTiO3) thin films on c-plane sapphire. MgTiO3 thin film with a (003) preferred-orientation was obtained by adjusting the substrate temperature, annealing temperature, and annealing time; (111)-preferring spinel Mg2TiO4 was found when magnesium titanate thin films were deposited at room temperature and then postannealed. X-ray diffraction was used to identify the orientation and quality of the crystal, providing information that is useful in elucidating the epitaxial relationships between the MgTiO 3/sapphire and Mg2TiO4/sapphire interfaces. The optical properties of the MgTiO3 were measured, and (003)-preferring MgTiO3 was found to be a good candidate for optical applications.

Original languageEnglish
Pages (from-to)363-366
Number of pages4
JournalJournal of the American Ceramic Society
Issue number2
Publication statusPublished - 2011 Feb 1

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry

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