In this paper, silicon-based micro-channels filled with deionized water and micro-beads were measured of their flow fields by using a self-improved micro-particle image velocimetry (MPIV). The designed channels were ranging from 100 to 300μm in width and 60μm in depth, and the velocity was thousands of micrometers per second with Reynolds number <0.1. Commercial software CFD-ACE+ was used to simulate the flows. The simulation results showed great agreement with the measured results, implying that Navier-Stokes' equations still effectively governs the micro-scope flows in this scale. Two flow parameters - axial momentum number (Ku) and asymmetry number (Ka) - were discussed and were effectively evaluated the flow conditions with low Reynolds number. Preliminary result shows that short entrance length was found sufficient for fully developed flow in straight micro-channel. In addition, the flows in sharply expanded channels and serpentine channels are discussed.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering