TY - GEN
T1 - Micro fluidic system by integrating pressure sensor arrays with a micro-channel
AU - Ko, H. S.
AU - Liu, C. W.
AU - Liu, C. G.
AU - Gau, C.
PY - 2007/8/28
Y1 - 2007/8/28
N2 - This fabrication process developed in the current paper is almost the reverse of the surface micromachining process usually used for the microchannel system. This allows the use of SU-8 to fabricate, by lithography, the diaphragm and the cavities used for these pressure sensors, and the channel. The fabrication process has many advantages over others, such as completely absence of diaphragm sitction, allowing much wider measurement range and flow conditions. More detailed design and fabrication techniques developed, and the calibration of sensors for this channel system is presented. The pressure distributions measured along the channel are compared with the analysis.
AB - This fabrication process developed in the current paper is almost the reverse of the surface micromachining process usually used for the microchannel system. This allows the use of SU-8 to fabricate, by lithography, the diaphragm and the cavities used for these pressure sensors, and the channel. The fabrication process has many advantages over others, such as completely absence of diaphragm sitction, allowing much wider measurement range and flow conditions. More detailed design and fabrication techniques developed, and the calibration of sensors for this channel system is presented. The pressure distributions measured along the channel are compared with the analysis.
UR - http://www.scopus.com/inward/record.url?scp=34548140565&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34548140565&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2007.352042
DO - 10.1109/NEMS.2007.352042
M3 - Conference contribution
AN - SCOPUS:34548140565
SN - 1424406102
SN - 9781424406104
T3 - Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
SP - 386
EP - 389
BT - Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
T2 - 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Y2 - 16 January 2007 through 19 January 2007
ER -