Micro fluidic system by integrating pressure sensor arrays with a micro-channel

H. S. Ko, C. W. Liu, C. G. Liu, C. Gau

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This fabrication process developed in the current paper is almost the reverse of the surface micromachining process usually used for the microchannel system. This allows the use of SU-8 to fabricate, by lithography, the diaphragm and the cavities used for these pressure sensors, and the channel. The fabrication process has many advantages over others, such as completely absence of diaphragm sitction, allowing much wider measurement range and flow conditions. More detailed design and fabrication techniques developed, and the calibration of sensors for this channel system is presented. The pressure distributions measured along the channel are compared with the analysis.

Original languageEnglish
Title of host publicationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages386-389
Number of pages4
DOIs
Publication statusPublished - 2007 Aug 28
Event2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand
Duration: 2007 Jan 162007 Jan 19

Publication series

NameProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Other

Other2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
CountryThailand
CityBangkok
Period07-01-1607-01-19

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Computer Science Applications
  • Electrical and Electronic Engineering

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