Micro fluidic system by integrating pressure sensor arrays with a micro-channel

H. S. Ko; C. W. Liu; C. G. Liu; C. Gau

doi:10.1109/NEMS.2007.352042

Micro fluidic system by integrating pressure sensor arrays with a micro-channel

H. S. Ko, C. W. Liu, C. G. Liu, C. Gau

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This fabrication process developed in the current paper is almost the reverse of the surface micromachining process usually used for the microchannel system. This allows the use of SU-8 to fabricate, by lithography, the diaphragm and the cavities used for these pressure sensors, and the channel. The fabrication process has many advantages over others, such as completely absence of diaphragm sitction, allowing much wider measurement range and flow conditions. More detailed design and fabrication techniques developed, and the calibration of sensors for this channel system is presented. The pressure distributions measured along the channel are compared with the analysis.

Original language	English
Title of host publication	Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages	386-389
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2007.352042
Publication status	Published - 2007 Aug 28
Event	2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand Duration: 2007 Jan 16 → 2007 Jan 19

Publication series

Name	Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Other

Other	2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Country	Thailand
City	Bangkok
Period	07-01-16 → 07-01-19

All Science Journal Classification (ASJC) codes

Computer Networks and Communications
Computer Science Applications
Electrical and Electronic Engineering

Access to Document

10.1109/NEMS.2007.352042

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Ko, H. S., Liu, C. W., Liu, C. G., & Gau, C. (2007). Micro fluidic system by integrating pressure sensor arrays with a micro-channel. In Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 (pp. 386-389). [4160345] (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007). https://doi.org/10.1109/NEMS.2007.352042

Ko, H. S. ; Liu, C. W. ; Liu, C. G. ; Gau, C. / Micro fluidic system by integrating pressure sensor arrays with a micro-channel. Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. pp. 386-389 (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007).

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title = "Micro fluidic system by integrating pressure sensor arrays with a micro-channel",

abstract = "This fabrication process developed in the current paper is almost the reverse of the surface micromachining process usually used for the microchannel system. This allows the use of SU-8 to fabricate, by lithography, the diaphragm and the cavities used for these pressure sensors, and the channel. The fabrication process has many advantages over others, such as completely absence of diaphragm sitction, allowing much wider measurement range and flow conditions. More detailed design and fabrication techniques developed, and the calibration of sensors for this channel system is presented. The pressure distributions measured along the channel are compared with the analysis.",

author = "Ko, {H. S.} and Liu, {C. W.} and Liu, {C. G.} and C. Gau",

year = "2007",

month = aug,

day = "28",

doi = "10.1109/NEMS.2007.352042",

language = "English",

isbn = "1424406102",

series = "Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007",

pages = "386--389",

booktitle = "Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007",

note = "2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 ; Conference date: 16-01-2007 Through 19-01-2007",

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Ko, HS, Liu, CW, Liu, CG & Gau, C 2007, Micro fluidic system by integrating pressure sensor arrays with a micro-channel. in Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007., 4160345, Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, pp. 386-389, 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, Bangkok, Thailand, 07-01-16. https://doi.org/10.1109/NEMS.2007.352042

Micro fluidic system by integrating pressure sensor arrays with a micro-channel. / Ko, H. S.; Liu, C. W.; Liu, C. G.; Gau, C.

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. p. 386-389 4160345 (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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Ko HS, Liu CW, Liu CG, Gau C. Micro fluidic system by integrating pressure sensor arrays with a micro-channel. In Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. p. 386-389. 4160345. (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007). https://doi.org/10.1109/NEMS.2007.352042