Micro pressure sensor fabrication without problem of stiction for a wider range of measurement

C. W. Liu; H. S. Ko; Chie Gau; C. G. Liu

Micro pressure sensor fabrication without problem of stiction for a wider range of measurement

C. W. Liu, H. S. Ko, Chie Gau, C. G. Liu

Research output: Contribution to conference › Paper › peer-review

Abstract

The objective of this paper is to present a novel fabrication process for a or arrays of micro pressure sensors. The fabrication process is almost the reverse of the surface micromachining process used for the pressure sensor. This allows the use of SU-8 to form cavity that can be much deeper for pressure measurement. Thus, the sensor made can provide a much wider range of pressure measurement. The fabrication process has completely absence of diaphragm sitction. In addition, arrays of pressure sensor can be readily made and integrated into a complicated micro system. More detailed design and fabrication techniques developed for this sensor will be presented.

Original language	English
Pages	856-859
Number of pages	4
Publication status	Published - 2004 Dec 1
Event	IEEE Sensors 2004 - Vienna, Austria Duration: 2004 Oct 24 → 2004 Oct 27

Other

Other	IEEE Sensors 2004
Country/Territory	Austria
City	Vienna
Period	04-10-24 → 04-10-27

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Cite this

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title = "Micro pressure sensor fabrication without problem of stiction for a wider range of measurement",

abstract = "The objective of this paper is to present a novel fabrication process for a or arrays of micro pressure sensors. The fabrication process is almost the reverse of the surface micromachining process used for the pressure sensor. This allows the use of SU-8 to form cavity that can be much deeper for pressure measurement. Thus, the sensor made can provide a much wider range of pressure measurement. The fabrication process has completely absence of diaphragm sitction. In addition, arrays of pressure sensor can be readily made and integrated into a complicated micro system. More detailed design and fabrication techniques developed for this sensor will be presented.",

author = "Liu, {C. W.} and Ko, {H. S.} and Chie Gau and Liu, {C. G.}",

year = "2004",

month = dec,

day = "1",

language = "English",

pages = "856--859",

note = "IEEE Sensors 2004 ; Conference date: 24-10-2004 Through 27-10-2004",

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T1 - Micro pressure sensor fabrication without problem of stiction for a wider range of measurement

AU - Liu, C. W.

AU - Ko, H. S.

AU - Gau, Chie

AU - Liu, C. G.

PY - 2004/12/1

Y1 - 2004/12/1

N2 - The objective of this paper is to present a novel fabrication process for a or arrays of micro pressure sensors. The fabrication process is almost the reverse of the surface micromachining process used for the pressure sensor. This allows the use of SU-8 to form cavity that can be much deeper for pressure measurement. Thus, the sensor made can provide a much wider range of pressure measurement. The fabrication process has completely absence of diaphragm sitction. In addition, arrays of pressure sensor can be readily made and integrated into a complicated micro system. More detailed design and fabrication techniques developed for this sensor will be presented.

AB - The objective of this paper is to present a novel fabrication process for a or arrays of micro pressure sensors. The fabrication process is almost the reverse of the surface micromachining process used for the pressure sensor. This allows the use of SU-8 to form cavity that can be much deeper for pressure measurement. Thus, the sensor made can provide a much wider range of pressure measurement. The fabrication process has completely absence of diaphragm sitction. In addition, arrays of pressure sensor can be readily made and integrated into a complicated micro system. More detailed design and fabrication techniques developed for this sensor will be presented.

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UR - http://www.scopus.com/inward/citedby.url?scp=27944464111&partnerID=8YFLogxK

M3 - Paper

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SP - 856

EP - 859

T2 - IEEE Sensors 2004

Y2 - 24 October 2004 through 27 October 2004

ER -

Micro pressure sensor fabrication without problem of stiction for a wider range of measurement

Abstract

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All Science Journal Classification (ASJC) codes

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