Abstract
In this study, we exploit the bending-up of a cantilever paddle caused by residual stress to manufacture a micro-gas-flow-sensor for high-flow-rate sensing. Microsensors not only have a smaller physical size than their traditional counterparts, but also provide greater measurement accuracy and a higher sensitivity in the high gas flow velocity range. In this study, micro-electro-mechanical system (MEMS) techniques are used to deposit a silicon nitride layer on a silicon wafer to create a cantilever structure. A platinum layer is deposited on the silicon nitride layer to form a resistor and the structure is then etched to form a freestanding microcantilever. It is found that the cantilever slightly bends upward as a result of the released residual stress induced in the beam during the fabrication process. When airflow passes over the cantilever beam, a small deformation occurs. Variations in the airflow velocity can therefore be determined by measuring the changes in resistance caused by the beam deflection using an inductance-capacitance-resistance (LCR) meter. The experimental data indicate that the proposed gas flow sensor has a high sensitivity (0.0533 Ω/ms -1), a high measurement limit (45 ms -1) and a short response time (1.38 s).
| Original language | English |
|---|---|
| Pages (from-to) | 405-417 |
| Number of pages | 13 |
| Journal | Sensors and Materials |
| Volume | 18 |
| Issue number | 8 |
| Publication status | Published - 2006 Dec 1 |
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All Science Journal Classification (ASJC) codes
- Instrumentation
- Materials Science(all)
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Micromachined silicon cantilever paddle for high-flow-rate sensing. / Ma, Rong Hua; Ho, Ming Chin; Lee, Chia Yen; Wang, Yu Hsiang; Fu, Lung-Ming.
In: Sensors and Materials, Vol. 18, No. 8, 01.12.2006, p. 405-417.Research output: Contribution to journal › Article
TY - JOUR
T1 - Micromachined silicon cantilever paddle for high-flow-rate sensing
AU - Ma, Rong Hua
AU - Ho, Ming Chin
AU - Lee, Chia Yen
AU - Wang, Yu Hsiang
AU - Fu, Lung-Ming
PY - 2006/12/1
Y1 - 2006/12/1
N2 - In this study, we exploit the bending-up of a cantilever paddle caused by residual stress to manufacture a micro-gas-flow-sensor for high-flow-rate sensing. Microsensors not only have a smaller physical size than their traditional counterparts, but also provide greater measurement accuracy and a higher sensitivity in the high gas flow velocity range. In this study, micro-electro-mechanical system (MEMS) techniques are used to deposit a silicon nitride layer on a silicon wafer to create a cantilever structure. A platinum layer is deposited on the silicon nitride layer to form a resistor and the structure is then etched to form a freestanding microcantilever. It is found that the cantilever slightly bends upward as a result of the released residual stress induced in the beam during the fabrication process. When airflow passes over the cantilever beam, a small deformation occurs. Variations in the airflow velocity can therefore be determined by measuring the changes in resistance caused by the beam deflection using an inductance-capacitance-resistance (LCR) meter. The experimental data indicate that the proposed gas flow sensor has a high sensitivity (0.0533 Ω/ms -1), a high measurement limit (45 ms -1) and a short response time (1.38 s).
AB - In this study, we exploit the bending-up of a cantilever paddle caused by residual stress to manufacture a micro-gas-flow-sensor for high-flow-rate sensing. Microsensors not only have a smaller physical size than their traditional counterparts, but also provide greater measurement accuracy and a higher sensitivity in the high gas flow velocity range. In this study, micro-electro-mechanical system (MEMS) techniques are used to deposit a silicon nitride layer on a silicon wafer to create a cantilever structure. A platinum layer is deposited on the silicon nitride layer to form a resistor and the structure is then etched to form a freestanding microcantilever. It is found that the cantilever slightly bends upward as a result of the released residual stress induced in the beam during the fabrication process. When airflow passes over the cantilever beam, a small deformation occurs. Variations in the airflow velocity can therefore be determined by measuring the changes in resistance caused by the beam deflection using an inductance-capacitance-resistance (LCR) meter. The experimental data indicate that the proposed gas flow sensor has a high sensitivity (0.0533 Ω/ms -1), a high measurement limit (45 ms -1) and a short response time (1.38 s).
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M3 - Article
VL - 18
SP - 405
EP - 417
JO - Sensors and Materials
JF - Sensors and Materials
SN - 0914-4935
IS - 8
ER -