Micromachined silicon cantilever paddle for high-flow-rate sensing

Rong Hua Ma, Ming Chin Ho, Chia Yen Lee, Yu Hsiang Wang, Lung-Ming Fu

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

In this study, we exploit the bending-up of a cantilever paddle caused by residual stress to manufacture a micro-gas-flow-sensor for high-flow-rate sensing. Microsensors not only have a smaller physical size than their traditional counterparts, but also provide greater measurement accuracy and a higher sensitivity in the high gas flow velocity range. In this study, micro-electro-mechanical system (MEMS) techniques are used to deposit a silicon nitride layer on a silicon wafer to create a cantilever structure. A platinum layer is deposited on the silicon nitride layer to form a resistor and the structure is then etched to form a freestanding microcantilever. It is found that the cantilever slightly bends upward as a result of the released residual stress induced in the beam during the fabrication process. When airflow passes over the cantilever beam, a small deformation occurs. Variations in the airflow velocity can therefore be determined by measuring the changes in resistance caused by the beam deflection using an inductance-capacitance-resistance (LCR) meter. The experimental data indicate that the proposed gas flow sensor has a high sensitivity (0.0533 Ω/ms -1), a high measurement limit (45 ms -1) and a short response time (1.38 s).

Original languageEnglish
Pages (from-to)405-417
Number of pages13
JournalSensors and Materials
Volume18
Issue number8
Publication statusPublished - 2006 Dec 1

Fingerprint

paddles
Silicon
gas flow
Flow of gases
flow velocity
Flow rate
Silicon nitride
silicon nitrides
residual stress
Residual stresses
silicon
Microsensors
cantilever beams
sensitivity
sensors
Sensors
Cantilever beams
Platinum
Silicon wafers
inductance

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Materials Science(all)

Cite this

Ma, R. H., Ho, M. C., Lee, C. Y., Wang, Y. H., & Fu, L-M. (2006). Micromachined silicon cantilever paddle for high-flow-rate sensing. Sensors and Materials, 18(8), 405-417.
Ma, Rong Hua ; Ho, Ming Chin ; Lee, Chia Yen ; Wang, Yu Hsiang ; Fu, Lung-Ming. / Micromachined silicon cantilever paddle for high-flow-rate sensing. In: Sensors and Materials. 2006 ; Vol. 18, No. 8. pp. 405-417.
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Ma, RH, Ho, MC, Lee, CY, Wang, YH & Fu, L-M 2006, 'Micromachined silicon cantilever paddle for high-flow-rate sensing', Sensors and Materials, vol. 18, no. 8, pp. 405-417.

Micromachined silicon cantilever paddle for high-flow-rate sensing. / Ma, Rong Hua; Ho, Ming Chin; Lee, Chia Yen; Wang, Yu Hsiang; Fu, Lung-Ming.

In: Sensors and Materials, Vol. 18, No. 8, 01.12.2006, p. 405-417.

Research output: Contribution to journalArticle

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