Micromachined thermionic emitter

Dung Ching Perng, David A. Crewe, Sung B. Lee, Alan D. Feinerman

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Arrays of sputtered tungsten thermionic emitters with different shapes have been fabricated. A single filament had an emission current of 10 nAmps and a one hour lifetime. The resistance of a filament decreased an order of magnitude with 25 minutes of annealing. After emission the filament appears to have recrystallized in the emitting area. The surface roughness of the recrystallized area strongly depends on the duration of annealing and emitting time. The variation of filament resistance during operation has been investigated. A thermionic emitter has been used as a source for a sub-cm electron optical column. An array of emitters could be used as a high resolution cathode ray tube if the supports are made from a low thermal conductivity material like glassy carbon with thermal conductivity of 10-3 watt/cm-K1.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherPubl by Int Soc for Optical Engineering
Number of pages9
ISBN (Print)0819409502
Publication statusPublished - 1992 Dec 1
EventImaging Technologies and Applications - Chicago, IL, USA
Duration: 1992 Mar 191992 Mar 19

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherImaging Technologies and Applications
CityChicago, IL, USA

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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