Micromachined thermionic emitters

Dung-Ching Perng, D. A. Crewe, A. D. Feinerman

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Arrays of sputtered tungsten thermionic emitters have been fabricated. The emitters are microbridges which were fabricated by removing a sacrificial layer of SiO2 below a patterned film, and have two thicknesses: 0.45 and 1.1 mu m. The emitting shape varies from a single straight 'wires'. The emitters initially have a high resistance which drops an order of magnitude with an annealing current. A thermionic electron current of over 10 nA for a duration of 5 to 55 min has been measured. The lifetime depends on the microbridge thickness, shape, and emitting current. Micrographs after emission indicate recrystallization and melting at the midpoint of the microbridges. The thermionic emitters will be used as sources for a miniature scanning electron microscope (MSEM) with a column length of 1-4 mm.

Original languageEnglish
Article number006
Pages (from-to)25-30
Number of pages6
JournalJournal of Micromechanics and Microengineering
Volume2
Issue number1
DOIs
Publication statusPublished - 1992 Dec 1

Fingerprint

Tungsten
Melting
Electron microscopes
Wire
Annealing
Scanning
Electrons

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Perng, Dung-Ching ; Crewe, D. A. ; Feinerman, A. D. / Micromachined thermionic emitters. In: Journal of Micromechanics and Microengineering. 1992 ; Vol. 2, No. 1. pp. 25-30.
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Micromachined thermionic emitters. / Perng, Dung-Ching; Crewe, D. A.; Feinerman, A. D.

In: Journal of Micromechanics and Microengineering, Vol. 2, No. 1, 006, 01.12.1992, p. 25-30.

Research output: Contribution to journalArticle

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