Micrometer Level Positioning Design

Yung Yue Chen, Yu Jen Lan, Ming Cheng Wang, Yi Qing Zhang, Chun Jung Tsai

Research output: Chapter in Book/Report/Conference proceedingConference contribution


One of the actuators that possesses a relatively higher accuracy and a very smaller size is the piezoelectric actuator. Micro-level positioning designs of piezoelectric actuators have attracted the attention of researchers. However, performances of piezoelectric actuators are naturally affected by piezoelectric elements' nonlinear hysteresis effect, modeling uncertainties of piezoelectric actuators, and external disturbances from the surrounding environment. To cancel the nonlinear effect and achieve precise positioning ability, a modelfree robust adaptive fuzzy controller is developed for piezoelectric actuators in this working paper. From the simulation results, a piezoelectric actuator with a micro-level positioning accuracy is accomplished based on our proposed method.

Original languageEnglish
Title of host publication2020 International Automatic Control Conference, CACS 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728171982
Publication statusPublished - 2020 Nov 4
Event2020 International Automatic Control Conference, CACS 2020 - Hsinchu, Taiwan
Duration: 2020 Nov 42020 Nov 7

Publication series

Name2020 International Automatic Control Conference, CACS 2020


Conference2020 International Automatic Control Conference, CACS 2020

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Automotive Engineering
  • Industrial and Manufacturing Engineering
  • Control and Systems Engineering
  • Control and Optimization
  • Modelling and Simulation


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