MICRO/NANO IMPRINTING APPARATUS

Yung-Chun Lee (Inventor)

Research output: Patent

Abstract

一種微奈米壓印機台。此微奈米壓印機台至少包括一基座、一承載座、一升降螺桿、以及一氣囊。承載座設置在基座之表面上。升降螺桿架設在承載座之上,且可相對於承載座升降。氣囊設置在升降螺桿之下端,且與承載座相對。
Translated title of the contribution微奈米壓印機台
Original languageEnglish
Patent numberI341795
Publication statusPublished - 1800

Cite this

Lee, Y-C. (1800). MICRO/NANO IMPRINTING APPARATUS. (Patent No. I341795).