MICRO/NANO IMPRINTING APPARATUS

Yung-Chun Lee (Inventor)

Research output: Patent

Abstract

一種微奈米壓印機台。此微奈米壓印機台至少包括一基座、一承載座、一升降螺桿、以及一氣囊。承載座設置在基座之表面上。升降螺桿架設在承載座之上,且可相對於承載座升降。氣囊設置在升降螺桿之下端,且與承載座相對。
Original languageEnglish
Patent numberI341795
Publication statusPublished - 1800

Cite this

Lee, Y-C. (1800). MICRO/NANO IMPRINTING APPARATUS. (Patent No. I341795).
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abstract = "一種微奈米壓印機台。此微奈米壓印機台至少包括一基座、一承載座、一升降螺桿、以及一氣囊。承載座設置在基座之表面上。升降螺桿架設在承載座之上,且可相對於承載座升降。氣囊設置在升降螺桿之下端,且與承載座相對。",
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year = "1800",
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Lee, Y-C 1800, MICRO/NANO IMPRINTING APPARATUS, Patent No. I341795.

MICRO/NANO IMPRINTING APPARATUS. / Lee, Yung-Chun (Inventor).

Patent No.: I341795.

Research output: Patent

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T1 - MICRO/NANO IMPRINTING APPARATUS

AU - Lee, Yung-Chun

PY - 1800

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AB - 一種微奈米壓印機台。此微奈米壓印機台至少包括一基座、一承載座、一升降螺桿、以及一氣囊。承載座設置在基座之表面上。升降螺桿架設在承載座之上,且可相對於承載座升降。氣囊設置在升降螺桿之下端,且與承載座相對。

M3 - Patent

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Lee Y-C, inventor. MICRO/NANO IMPRINTING APPARATUS. I341795. 1800.