MICROPLASMA SOURCE AND STERILIZATION SYSTEM INCLUDING THE SAME

Jiunn-Der Liao (Inventor)

Research output: Patent

Abstract

A microplasma source and a sterilization system including the same are disclosed. The microplasma source includes: a microplasma-generating unit including: a gas transmission chamber having a first inlet and a first outlet wherein the first inlet is used to import a first gas; a protection and heat dissipation chamber of which a side is connected to the inner wall of the first outlet; a dielectric inner tube having a second inlet and a second outlet and penetrating through the protection and heat dissipation chamber, wherein the second inlet is communicated to the gas transmission chamber;
Original languageEnglish
Patent number10 2011 053 371
Publication statusPublished - 2012 Mar 8

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