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Micropressure sensor fabrication without problem of stiction for a wider range of measurement
H. S. Ko, C. W. Liu, Chie Gau
Department of Aeronautics and Astronautics
International Bachelor Degree Program on Energy
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peer-review
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Chemical Compounds
Stiction
Fabrication
Pressure measurement
Diaphragms
Pressure sensors
Sensors
Surface micromachining
Flow measurement
Microchannels
Engineering & Materials Science
Stiction
Fabrication
Pressure measurement
Diaphragms
Pressure sensors
Sensors
Surface micromachining
Flow measurement
Microchannels
Physics & Astronomy
stiction
diaphragms
pressure sensors
sensors
fabrication
pressure measurement
flow measurement
micromachining
microchannels
cavities