Microstructure and mechanical properties of TiN/NbN multilayered coating

Chien Cheng Liu, Kuang Yi Liu, Huai Wei Yan, Chia Li Ma, Jow Lay Huang

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In this study, multilayers of TiN/NbN were deposited by d.c. magnetron sputtering on die steel substrates. The structure, morphology and nano-hardness were assessed using X-ray diffraction, atomic force microscopy (AFM), stylus profiler (XP-2 stylus profiler) and nanoindentation, respectively. Wear tests were performed on pin-on-disk configuration and dry sliding conditions, at 5N load by using hardened steel ball. The result shows TiN with highly (111) preferred orientation. On mechanical properties, Young's modulus and hardness values increase for layers number increase. At 64 layers films had the highest nano-hardness, Young's modulus values. The TiN/NbN multilayer films presented changes in its morphology becoming more granulated and density after heating up to 500°C. A significant decrease in friction coefficient has been achieved for TiN/NbN multilayers against steel ball.

Original languageEnglish
Title of host publicationHigh-Performance Ceramics VI
PublisherTrans Tech Publications Ltd
Number of pages3
ISBN (Print)0878492747, 9780878492749
Publication statusPublished - 2010
Event6th China International Conference on High-Performance Ceramics, CICC-6 - Harbin, China
Duration: 2009 Aug 162009 Aug 19

Publication series

NameKey Engineering Materials
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795


Other6th China International Conference on High-Performance Ceramics, CICC-6

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


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