Microstructure and optical properties of AlOx thin films grown on ZnO-deposited glass

Su Shia Lin, Jow-Lay Huang

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

AlOx thin films were grown on ZnO-deposited glass substrates under different conditions using magnetron sputtering. The influence of processing parameters (mainly direct-current power and oxidizing atmosphere) on the structure and optical properties were investigated. The AlOx films for all samples in this study showed the coexistence of amorphous and polycrystalline structures. The kinetics of crystal growth could influence the dominant crystal orientation. Fast-growing planes were not the most thermodynamically stable, but were kinetically controlled under the film growth condition. Oxidizing the sample in O2 atmosphere made the AlOx film grow in random directions. The excess oxygen was chemisorbed at the interface between AlOx and ZnO. Therefore, the neighboring oxygen-oxygen distance of AlOx and that of ZnO on their closest-packed planes seriously mismatched. At high power, the particles arrived at the substrate with high kinetic energy and high rate, which led to low density due to porous structure. The transmission decreased with an increase of the pores and surface roughness of AlOx film on ZnO-deposited glass. However, the diffusion of oxygen into the grains improved transmission when the sample was oxidized in O2 atmosphere.

Original languageEnglish
Pages (from-to)1943-1949
Number of pages7
JournalJournal of Materials Research
Volume18
Issue number8
DOIs
Publication statusPublished - 2003 Jan 1

Fingerprint

Optical properties
Oxygen
optical properties
Glass
Thin films
microstructure
Microstructure
glass
oxygen
thin films
atmospheres
Film growth
Substrates
Crystallization
Crystal growth
Kinetic energy
Crystal orientation
Magnetron sputtering
crystal growth
magnetron sputtering

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

@article{0a34ae7e1523491d896927228be44a0e,
title = "Microstructure and optical properties of AlOx thin films grown on ZnO-deposited glass",
abstract = "AlOx thin films were grown on ZnO-deposited glass substrates under different conditions using magnetron sputtering. The influence of processing parameters (mainly direct-current power and oxidizing atmosphere) on the structure and optical properties were investigated. The AlOx films for all samples in this study showed the coexistence of amorphous and polycrystalline structures. The kinetics of crystal growth could influence the dominant crystal orientation. Fast-growing planes were not the most thermodynamically stable, but were kinetically controlled under the film growth condition. Oxidizing the sample in O2 atmosphere made the AlOx film grow in random directions. The excess oxygen was chemisorbed at the interface between AlOx and ZnO. Therefore, the neighboring oxygen-oxygen distance of AlOx and that of ZnO on their closest-packed planes seriously mismatched. At high power, the particles arrived at the substrate with high kinetic energy and high rate, which led to low density due to porous structure. The transmission decreased with an increase of the pores and surface roughness of AlOx film on ZnO-deposited glass. However, the diffusion of oxygen into the grains improved transmission when the sample was oxidized in O2 atmosphere.",
author = "Lin, {Su Shia} and Jow-Lay Huang",
year = "2003",
month = "1",
day = "1",
doi = "10.1557/JMR.2003.0270",
language = "English",
volume = "18",
pages = "1943--1949",
journal = "Journal of Materials Research",
issn = "0884-2914",
publisher = "Materials Research Society",
number = "8",

}

Microstructure and optical properties of AlOx thin films grown on ZnO-deposited glass. / Lin, Su Shia; Huang, Jow-Lay.

In: Journal of Materials Research, Vol. 18, No. 8, 01.01.2003, p. 1943-1949.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Microstructure and optical properties of AlOx thin films grown on ZnO-deposited glass

AU - Lin, Su Shia

AU - Huang, Jow-Lay

PY - 2003/1/1

Y1 - 2003/1/1

N2 - AlOx thin films were grown on ZnO-deposited glass substrates under different conditions using magnetron sputtering. The influence of processing parameters (mainly direct-current power and oxidizing atmosphere) on the structure and optical properties were investigated. The AlOx films for all samples in this study showed the coexistence of amorphous and polycrystalline structures. The kinetics of crystal growth could influence the dominant crystal orientation. Fast-growing planes were not the most thermodynamically stable, but were kinetically controlled under the film growth condition. Oxidizing the sample in O2 atmosphere made the AlOx film grow in random directions. The excess oxygen was chemisorbed at the interface between AlOx and ZnO. Therefore, the neighboring oxygen-oxygen distance of AlOx and that of ZnO on their closest-packed planes seriously mismatched. At high power, the particles arrived at the substrate with high kinetic energy and high rate, which led to low density due to porous structure. The transmission decreased with an increase of the pores and surface roughness of AlOx film on ZnO-deposited glass. However, the diffusion of oxygen into the grains improved transmission when the sample was oxidized in O2 atmosphere.

AB - AlOx thin films were grown on ZnO-deposited glass substrates under different conditions using magnetron sputtering. The influence of processing parameters (mainly direct-current power and oxidizing atmosphere) on the structure and optical properties were investigated. The AlOx films for all samples in this study showed the coexistence of amorphous and polycrystalline structures. The kinetics of crystal growth could influence the dominant crystal orientation. Fast-growing planes were not the most thermodynamically stable, but were kinetically controlled under the film growth condition. Oxidizing the sample in O2 atmosphere made the AlOx film grow in random directions. The excess oxygen was chemisorbed at the interface between AlOx and ZnO. Therefore, the neighboring oxygen-oxygen distance of AlOx and that of ZnO on their closest-packed planes seriously mismatched. At high power, the particles arrived at the substrate with high kinetic energy and high rate, which led to low density due to porous structure. The transmission decreased with an increase of the pores and surface roughness of AlOx film on ZnO-deposited glass. However, the diffusion of oxygen into the grains improved transmission when the sample was oxidized in O2 atmosphere.

UR - http://www.scopus.com/inward/record.url?scp=0141837167&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0141837167&partnerID=8YFLogxK

U2 - 10.1557/JMR.2003.0270

DO - 10.1557/JMR.2003.0270

M3 - Article

VL - 18

SP - 1943

EP - 1949

JO - Journal of Materials Research

JF - Journal of Materials Research

SN - 0884-2914

IS - 8

ER -