Microstructure and optical properties of chromium containing amorphous hydrogenated carbon thin films (a-C:H/Cr)

Hsin Yen Cheng, Wan Yu Wu, Jyh-Ming Ting

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Chromium containing amorphous hydrogenated carbon thin films was deposited using a dc sputter deposition technique under various mixtures of methane and Ar. The microstructure, composition, and optical properties of the resulting films were investigated. We show that a-C:H/Cr thin films exhibiting absorptance in certain wavelengths are greater than 95% and the average absorptance was 86% in the 0.3 to 2.5 μm wavelength can be obtained by using appropriate methane/Ar ratios and deposition times.

Original languageEnglish
Pages (from-to)4724-4727
Number of pages4
JournalThin Solid Films
Volume517
Issue number17
DOIs
Publication statusPublished - 2009 Jul 1

Fingerprint

absorptance
Carbon films
Methane
Chromium
chromium
methane
Optical properties
optical properties
Thin films
Wavelength
microstructure
Sputter deposition
Microstructure
carbon
thin films
wavelengths
Chemical analysis

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

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Microstructure and optical properties of chromium containing amorphous hydrogenated carbon thin films (a-C:H/Cr). / Cheng, Hsin Yen; Wu, Wan Yu; Ting, Jyh-Ming.

In: Thin Solid Films, Vol. 517, No. 17, 01.07.2009, p. 4724-4727.

Research output: Contribution to journalArticle

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