Microstructure and optical properties of chromium containing amorphous hydrogenated carbon thin films (a-C:H/Cr)

Hsin Yen Cheng, Wan Yu Wu, Jyh Ming Ting

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Chromium containing amorphous hydrogenated carbon thin films was deposited using a dc sputter deposition technique under various mixtures of methane and Ar. The microstructure, composition, and optical properties of the resulting films were investigated. We show that a-C:H/Cr thin films exhibiting absorptance in certain wavelengths are greater than 95% and the average absorptance was 86% in the 0.3 to 2.5 μm wavelength can be obtained by using appropriate methane/Ar ratios and deposition times.

Original languageEnglish
Pages (from-to)4724-4727
Number of pages4
JournalThin Solid Films
Volume517
Issue number17
DOIs
Publication statusPublished - 2009 Jul 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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