Microstructure and optical properties of chromium containing amorphous hydrogenated carbon thin films (a-C:H/Cr)

Hsin Yen Cheng; Wan Yu Wu; Jyh Ming Ting

doi:10.1016/j.tsf.2009.03.095

Microstructure and optical properties of chromium containing amorphous hydrogenated carbon thin films (a-C:H/Cr)

Hsin Yen Cheng
, Wan Yu Wu
, Jyh Ming Ting

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

Chromium containing amorphous hydrogenated carbon thin films was deposited using a dc sputter deposition technique under various mixtures of methane and Ar. The microstructure, composition, and optical properties of the resulting films were investigated. We show that a-C:H/Cr thin films exhibiting absorptance in certain wavelengths are greater than 95% and the average absorptance was 86% in the 0.3 to 2.5 μm wavelength can be obtained by using appropriate methane/Ar ratios and deposition times.

Original language	English
Pages (from-to)	4724-4727
Number of pages	4
Journal	Thin Solid Films
Volume	517
Issue number	17
DOIs	https://doi.org/10.1016/j.tsf.2009.03.095
Publication status	Published - 2009 Jul 1

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2009.03.095

Cite this

@article{04993c2e5bed4f7a92b783b09ef907bc,

title = "Microstructure and optical properties of chromium containing amorphous hydrogenated carbon thin films (a-C:H/Cr)",

abstract = "Chromium containing amorphous hydrogenated carbon thin films was deposited using a dc sputter deposition technique under various mixtures of methane and Ar. The microstructure, composition, and optical properties of the resulting films were investigated. We show that a-C:H/Cr thin films exhibiting absorptance in certain wavelengths are greater than 95\% and the average absorptance was 86\% in the 0.3 to 2.5 μm wavelength can be obtained by using appropriate methane/Ar ratios and deposition times.",

author = "Cheng, \{Hsin Yen\} and Wu, \{Wan Yu\} and Ting, \{Jyh Ming\}",

note = "Funding Information: This work was supported by the National Science Council in Taiwan under grant no. NSC-96-2628-E-006-014-MY3. The use of FTIR for the thermal emittance measurements at the Industrial Technology Research Institute in Taiwan is also appreciated.",

year = "2009",

month = jul,

day = "1",

doi = "10.1016/j.tsf.2009.03.095",

language = "English",

volume = "517",

pages = "4724--4727",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier BV",

number = "17",

}

TY - JOUR

T1 - Microstructure and optical properties of chromium containing amorphous hydrogenated carbon thin films (a-C:H/Cr)

AU - Cheng, Hsin Yen

AU - Wu, Wan Yu

AU - Ting, Jyh Ming

N1 - Funding Information: This work was supported by the National Science Council in Taiwan under grant no. NSC-96-2628-E-006-014-MY3. The use of FTIR for the thermal emittance measurements at the Industrial Technology Research Institute in Taiwan is also appreciated.

PY - 2009/7/1

Y1 - 2009/7/1

N2 - Chromium containing amorphous hydrogenated carbon thin films was deposited using a dc sputter deposition technique under various mixtures of methane and Ar. The microstructure, composition, and optical properties of the resulting films were investigated. We show that a-C:H/Cr thin films exhibiting absorptance in certain wavelengths are greater than 95% and the average absorptance was 86% in the 0.3 to 2.5 μm wavelength can be obtained by using appropriate methane/Ar ratios and deposition times.

AB - Chromium containing amorphous hydrogenated carbon thin films was deposited using a dc sputter deposition technique under various mixtures of methane and Ar. The microstructure, composition, and optical properties of the resulting films were investigated. We show that a-C:H/Cr thin films exhibiting absorptance in certain wavelengths are greater than 95% and the average absorptance was 86% in the 0.3 to 2.5 μm wavelength can be obtained by using appropriate methane/Ar ratios and deposition times.

UR - https://www.scopus.com/pages/publications/65649130501

UR - https://www.scopus.com/pages/publications/65649130501#tab=citedBy

U2 - 10.1016/j.tsf.2009.03.095

DO - 10.1016/j.tsf.2009.03.095

M3 - Article

AN - SCOPUS:65649130501

SN - 0040-6090

VL - 517

SP - 4724

EP - 4727

JO - Thin Solid Films

JF - Thin Solid Films

IS - 17

ER -

Microstructure and optical properties of chromium containing amorphous hydrogenated carbon thin films (a-C:H/Cr)

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this