Abstract
Highly c-axis preferred orientation ScAlN films were deposited on Y-128° lithium niobate using the co-sputtering technique. The substitution of Sc atoms at Al positions causes a lattice distortion and induces a large piezoelectric response. X-ray diffraction patterns indicated that most of the films showed (002) peaks and the best crystallinity appeared at the Sc content of 9.0 at%. The cross-section of TEM results showed that the higher c-axis orientation columnar structure formed as the film thickness increased, and the structure transforms from wurtzite to cubical structure from the nano-beam diffraction analysis. Then the piezoelectric coefficient would be enhanced obviously at the Sc content of 18.1 at% and the value is nearly two times larger than pure AlN. After rapid thermal annealing treatment, the crystal quality could be improved and the highest value of piezoelectric coefficient was achieved at 18.26 pC/N.
| Original language | English |
|---|---|
| Pages (from-to) | 129-132 |
| Number of pages | 4 |
| Journal | Surface and Coatings Technology |
| Volume | 284 |
| DOIs | |
| Publication status | Published - 2015 Dec 25 |
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All Science Journal Classification (ASJC) codes
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
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Microstructure and piezoelectric properties of c-axis ScAlN films on the Y-128° LiNbO3 substrate. / Chen, Pin Hung; Wu, Sean; Chen, Yi-Chun; Huang, Jow-Lay; Lii, Ding Fwu; Lin, Zhi Xun.
In: Surface and Coatings Technology, Vol. 284, 25.12.2015, p. 129-132.Research output: Contribution to journal › Article
TY - JOUR
T1 - Microstructure and piezoelectric properties of c-axis ScAlN films on the Y-128° LiNbO3 substrate
AU - Chen, Pin Hung
AU - Wu, Sean
AU - Chen, Yi-Chun
AU - Huang, Jow-Lay
AU - Lii, Ding Fwu
AU - Lin, Zhi Xun
PY - 2015/12/25
Y1 - 2015/12/25
N2 - Highly c-axis preferred orientation ScAlN films were deposited on Y-128° lithium niobate using the co-sputtering technique. The substitution of Sc atoms at Al positions causes a lattice distortion and induces a large piezoelectric response. X-ray diffraction patterns indicated that most of the films showed (002) peaks and the best crystallinity appeared at the Sc content of 9.0 at%. The cross-section of TEM results showed that the higher c-axis orientation columnar structure formed as the film thickness increased, and the structure transforms from wurtzite to cubical structure from the nano-beam diffraction analysis. Then the piezoelectric coefficient would be enhanced obviously at the Sc content of 18.1 at% and the value is nearly two times larger than pure AlN. After rapid thermal annealing treatment, the crystal quality could be improved and the highest value of piezoelectric coefficient was achieved at 18.26 pC/N.
AB - Highly c-axis preferred orientation ScAlN films were deposited on Y-128° lithium niobate using the co-sputtering technique. The substitution of Sc atoms at Al positions causes a lattice distortion and induces a large piezoelectric response. X-ray diffraction patterns indicated that most of the films showed (002) peaks and the best crystallinity appeared at the Sc content of 9.0 at%. The cross-section of TEM results showed that the higher c-axis orientation columnar structure formed as the film thickness increased, and the structure transforms from wurtzite to cubical structure from the nano-beam diffraction analysis. Then the piezoelectric coefficient would be enhanced obviously at the Sc content of 18.1 at% and the value is nearly two times larger than pure AlN. After rapid thermal annealing treatment, the crystal quality could be improved and the highest value of piezoelectric coefficient was achieved at 18.26 pC/N.
UR - http://www.scopus.com/inward/record.url?scp=84944081043&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84944081043&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2015.08.078
DO - 10.1016/j.surfcoat.2015.08.078
M3 - Article
AN - SCOPUS:84944081043
VL - 284
SP - 129
EP - 132
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
ER -