Microstructure and piezoelectric properties of hexagonal MgxZn1−xO/ZnO films at lower Mg compositions

Hsin Hung Chen; Sanjaya Brahma; Chuan Pu Liu; Jow Lay Huang

doi:10.1016/j.tsf.2019.137459

Microstructure and piezoelectric properties of hexagonal Mg_xZn_1−xO/ZnO films at lower Mg compositions

Hsin Hung Chen, Sanjaya Brahma, Chuan Pu Liu, Jow Lay Huang

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

We investigate the piezoelectric coefficient (d₃₃) of Mg_xZn_1−xO and Mg_xZn_1−xO/ZnO films with the variation of the Mg concentration. The films are grown on Si (111) substrate using MgO and ZnO as targets by radio frequency magnetron sputtering. The thickness of all the films is fixed at around 500 nm for both Mg_xZn_1−xO and Mg_xZn_1−xO/ZnO films. All the films have high crystallinity with preferred orientation along c-axis and that shows columnar microstructures. Besides, the substitution of magnesium ions at zinc sites is confirmed by X-ray diffraction patterns, X-ray photoelectron spectroscopy and UV–Visible spectroscopy. The d₃₃ values reach 41.7 pm/V and 47.5 pm/V for Mg_xZn_1−xO and Mg_xZn_1−xO/ZnO (x = 0.30) films which is around 3.4 and 3.8 times larger than pure ZnO films (12.4 pm/V). The films may be considered as promising candidate for piezoelectric nanogenerators and piezotronic transistors.

Original language	English
Article number	137459
Journal	Thin Solid Films
Volume	690
DOIs	https://doi.org/10.1016/j.tsf.2019.137459
Publication status	Published - 2019 Nov 30

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2019.137459

Cite this

@article{147292b2c4ff47d1865ea03f988f2201,

title = "Microstructure and piezoelectric properties of hexagonal MgxZn1−xO/ZnO films at lower Mg compositions",

abstract = "We investigate the piezoelectric coefficient (d33) of MgxZn1−xO and MgxZn1−xO/ZnO films with the variation of the Mg concentration. The films are grown on Si (111) substrate using MgO and ZnO as targets by radio frequency magnetron sputtering. The thickness of all the films is fixed at around 500 nm for both MgxZn1−xO and MgxZn1−xO/ZnO films. All the films have high crystallinity with preferred orientation along c-axis and that shows columnar microstructures. Besides, the substitution of magnesium ions at zinc sites is confirmed by X-ray diffraction patterns, X-ray photoelectron spectroscopy and UV–Visible spectroscopy. The d33 values reach 41.7 pm/V and 47.5 pm/V for MgxZn1−xO and MgxZn1−xO/ZnO (x = 0.30) films which is around 3.4 and 3.8 times larger than pure ZnO films (12.4 pm/V). The films may be considered as promising candidate for piezoelectric nanogenerators and piezotronic transistors.",

author = "Chen, {Hsin Hung} and Sanjaya Brahma and Liu, {Chuan Pu} and Huang, {Jow Lay}",

note = "Funding Information: This work was financially supported by the Hierarchical Green-Energy Materials (Hi-GEM) Research Center , from The Featured Areas Research Center Program within the framework of the Higher Education Sprout Project by the Ministry of Education (MOE) ( MOST 107-3017-F-006 -003 ) in Taiwan. Publisher Copyright: {\textcopyright} 2019",

year = "2019",

month = nov,

day = "30",

doi = "10.1016/j.tsf.2019.137459",

language = "English",

volume = "690",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - Microstructure and piezoelectric properties of hexagonal MgxZn1−xO/ZnO films at lower Mg compositions

AU - Chen, Hsin Hung

AU - Brahma, Sanjaya

AU - Liu, Chuan Pu

AU - Huang, Jow Lay

N1 - Funding Information: This work was financially supported by the Hierarchical Green-Energy Materials (Hi-GEM) Research Center , from The Featured Areas Research Center Program within the framework of the Higher Education Sprout Project by the Ministry of Education (MOE) ( MOST 107-3017-F-006 -003 ) in Taiwan. Publisher Copyright: © 2019

PY - 2019/11/30

Y1 - 2019/11/30

N2 - We investigate the piezoelectric coefficient (d33) of MgxZn1−xO and MgxZn1−xO/ZnO films with the variation of the Mg concentration. The films are grown on Si (111) substrate using MgO and ZnO as targets by radio frequency magnetron sputtering. The thickness of all the films is fixed at around 500 nm for both MgxZn1−xO and MgxZn1−xO/ZnO films. All the films have high crystallinity with preferred orientation along c-axis and that shows columnar microstructures. Besides, the substitution of magnesium ions at zinc sites is confirmed by X-ray diffraction patterns, X-ray photoelectron spectroscopy and UV–Visible spectroscopy. The d33 values reach 41.7 pm/V and 47.5 pm/V for MgxZn1−xO and MgxZn1−xO/ZnO (x = 0.30) films which is around 3.4 and 3.8 times larger than pure ZnO films (12.4 pm/V). The films may be considered as promising candidate for piezoelectric nanogenerators and piezotronic transistors.

AB - We investigate the piezoelectric coefficient (d33) of MgxZn1−xO and MgxZn1−xO/ZnO films with the variation of the Mg concentration. The films are grown on Si (111) substrate using MgO and ZnO as targets by radio frequency magnetron sputtering. The thickness of all the films is fixed at around 500 nm for both MgxZn1−xO and MgxZn1−xO/ZnO films. All the films have high crystallinity with preferred orientation along c-axis and that shows columnar microstructures. Besides, the substitution of magnesium ions at zinc sites is confirmed by X-ray diffraction patterns, X-ray photoelectron spectroscopy and UV–Visible spectroscopy. The d33 values reach 41.7 pm/V and 47.5 pm/V for MgxZn1−xO and MgxZn1−xO/ZnO (x = 0.30) films which is around 3.4 and 3.8 times larger than pure ZnO films (12.4 pm/V). The films may be considered as promising candidate for piezoelectric nanogenerators and piezotronic transistors.

UR - http://www.scopus.com/inward/record.url?scp=85072029479&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85072029479&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2019.137459

DO - 10.1016/j.tsf.2019.137459

M3 - Article

AN - SCOPUS:85072029479

SN - 0040-6090

VL - 690

JO - Thin Solid Films

JF - Thin Solid Films

M1 - 137459

ER -

Microstructure and piezoelectric properties of hexagonal Mg_xZn_1−xO/ZnO films at lower Mg compositions

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this