Microstructure of strontium titanate thin film grown by the hydrothermal-electrochemical method

Koji Kajiyoshi, Yukio Hamaji, Kunisaburo Tomono, Toru Kasanami, Masahiro Yoshimura

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49 Citations (Scopus)


Microstructures of SrTiO3 thin films grown on Ti substrates by the hydrothermal-electrochemical method have been studied by transmission electron microscopy. The grown films consisted of a thin surface layer having an isotropic polycrystalline structure and a thick inner layer having a columnar structure. Pores of the order of several tens of nanometers were found at boundaries of columnar grains constituting the inner layer. A 20- or 30-nm-thick polycrystalline layer of Ti oxides contaminated with a small amount of Sr was also found at the SrTiO3 film/Ti substrate interface. During the film growth at this interface, the observed pores are considered to act as short-circuit paths for mass transport from the film surface to the interface.

Original languageEnglish
Pages (from-to)613-619
Number of pages7
JournalJournal of the American Ceramic Society
Issue number3
Publication statusPublished - 1996 Mar

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry


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