Microstructure of ZnO/Cu/TaN/SiO2/Si multilayers prepared by sputter deposition

Wan Yu Wu, Jyh Ming Ting

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


The deposition and characteristics of ZnO films on Cu/TaN/SiO 2/Si substrates were investigated. All the films obtained exhibited preferred orientation and columnar microstructure. Effect of O2/Ar ratio on the crystallinity was considered to be insignificant. The average grain size and deposition rate were found to increase with temperature.

Original languageEnglish
Pages (from-to)1603-1606
Number of pages4
JournalJournal of Materials Science Letters
Issue number22
Publication statusPublished - 2003 Nov 15

All Science Journal Classification (ASJC) codes

  • Materials Science(all)


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