TY - JOUR
T1 - Microstructure, optical, electrical, and magnetic properties of ZnO/CuO thin films prepared using two-stage magnetron sputtering and diffusion doping process
AU - Liu, Tai Hsiang
AU - Hung, Fei Yi
AU - Chen, Cheng Hung
AU - Chen, Kuan Jen
N1 - Funding Information:
Thank for the support of NCKU materials science and engineering department, the various facilities of Instrument Center, reference of the lab predecessors' research methods and the assistance of the advisor. (MOST 108-2221-E-006-140-MY).
Publisher Copyright:
© 2020, Springer Science+Business Media, LLC, part of Springer Nature.
PY - 2020/3/1
Y1 - 2020/3/1
N2 - In this study, CuZnO (CZO) films were fabricated by two-stage magnetron sputtering. The film crystallization and the diffusion of the copper layer were enhanced by 1 h heat treatment (500 ℃); then the nanowire was grown from the CZO film system using an aqueous solution method. After 2 h of heat treatment (500 ℃), the film and the nanowire system were observed. The morphology and microstructure were analyzed and their optical and electromagnetic properties were analyzed. The CZO thin film is doped with copper atoms by zinc oxide so that the concentration of the carrier is increased and the ferromagnetism is enhanced and the electrical properties are improved. There are many oxygen vacancies and interstitial zinc on the nanowire, which increases the concentration of zinc oxide carriers. The carriers improve electrical and magnetic properties. After heat treatment, copper atoms were diffused into the ZnO film layer in ZnO/CuZnO system, which can greatly improve the electrical and magnetic properties of the structure.
AB - In this study, CuZnO (CZO) films were fabricated by two-stage magnetron sputtering. The film crystallization and the diffusion of the copper layer were enhanced by 1 h heat treatment (500 ℃); then the nanowire was grown from the CZO film system using an aqueous solution method. After 2 h of heat treatment (500 ℃), the film and the nanowire system were observed. The morphology and microstructure were analyzed and their optical and electromagnetic properties were analyzed. The CZO thin film is doped with copper atoms by zinc oxide so that the concentration of the carrier is increased and the ferromagnetism is enhanced and the electrical properties are improved. There are many oxygen vacancies and interstitial zinc on the nanowire, which increases the concentration of zinc oxide carriers. The carriers improve electrical and magnetic properties. After heat treatment, copper atoms were diffused into the ZnO film layer in ZnO/CuZnO system, which can greatly improve the electrical and magnetic properties of the structure.
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U2 - 10.1007/s10854-020-02949-z
DO - 10.1007/s10854-020-02949-z
M3 - Article
AN - SCOPUS:85078844401
SN - 0957-4522
VL - 31
SP - 4017
EP - 4026
JO - Journal of Materials Science: Materials in Electronics
JF - Journal of Materials Science: Materials in Electronics
IS - 5
ER -