Microstructure, optical, electrical, and magnetic properties of ZnO/CuO thin films prepared using two-stage magnetron sputtering and diffusion doping process

Tai Hsiang Liu, Fei Yi Hung, Cheng Hung Chen, Kuan Jen Chen

Research output: Contribution to journalArticle


In this study, CuZnO (CZO) films were fabricated by two-stage magnetron sputtering. The film crystallization and the diffusion of the copper layer were enhanced by 1 h heat treatment (500 ℃); then the nanowire was grown from the CZO film system using an aqueous solution method. After 2 h of heat treatment (500 ℃), the film and the nanowire system were observed. The morphology and microstructure were analyzed and their optical and electromagnetic properties were analyzed. The CZO thin film is doped with copper atoms by zinc oxide so that the concentration of the carrier is increased and the ferromagnetism is enhanced and the electrical properties are improved. There are many oxygen vacancies and interstitial zinc on the nanowire, which increases the concentration of zinc oxide carriers. The carriers improve electrical and magnetic properties. After heat treatment, copper atoms were diffused into the ZnO film layer in ZnO/CuZnO system, which can greatly improve the electrical and magnetic properties of the structure.

Original languageEnglish
JournalJournal of Materials Science: Materials in Electronics
Publication statusAccepted/In press - 2020 Jan 1


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this