Microwave characteristic of SiON thin film surface passivation on low resistivity silicon wafer

Sin Pei Wang, Tzu Chun Tai, Jia Hao Lin, Cheng Yuan Hung, Hung Wei Wu, Yeong Her Wang, Shih Kun Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This study presents the amorphous silicon-oxy-nitride (SiON) thin film surface passivation layer depositing by very high frequency plasma-enhanced chemical vapor deposition (VHF PECVD) for applying on the application of surface passivation on standard low-resistivity silicon (LR-Si) substrate. The finite-ground coplanar waveguide (FG-CPW) line is fabricated on the SiON/LR-Si structure for investigating the microwave properties. The proposed finite-ground coplanar waveguide line is measured by accurate microwave on-wafer analysis platform up to 60 GHz. The surface passivation layer can improve microwave attenuation of the FG-CPW line. This method can be applied in radio frequency integrated circuit (RFIC).

Original languageEnglish
Title of host publicationProceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018
EditorsArtde Donald Kin-Tak Lam, Stephen D. Prior, Teen-Hang Meen
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1125-1128
Number of pages4
ISBN (Electronic)9781538643426
DOIs
Publication statusPublished - 2018 Jun 22
Event4th IEEE International Conference on Applied System Innovation, ICASI 2018 - Chiba, Japan
Duration: 2018 Apr 132018 Apr 17

Publication series

NameProceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018

Other

Other4th IEEE International Conference on Applied System Innovation, ICASI 2018
CountryJapan
CityChiba
Period18-04-1318-04-17

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Hardware and Architecture
  • Energy Engineering and Power Technology
  • Control and Systems Engineering
  • Mechanical Engineering
  • Control and Optimization
  • Modelling and Simulation
  • Biomedical Engineering

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