Microwave irradiation-assisted method for the deposition of adherent oxide films on semiconducting and dielectric substrates

Brahma Sanjaya, S. A. Shivashankar

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

We report a method for the deposition of thin films and thick coatings of metal oxides through the liquid medium, involving the microwave irradiation of a solution of a metal-organic complex in a suitable dielectric solvent. The process is a combination of sol-gel and dip-coating methods, wherein coatings can be obtained on nonconducting and semiconducting substrates, within a few minutes. Thin films of nanostructured ZnO (würtzite) have been obtained on Si(100), glass and polymer substrates, the nanostructure determined by process parameters. The coatings are strongly adherent and uniform over 15 mm × 15 mm, the growth rate ∼ 0.25 μm/min. Coatings of nanocrystalline Fe 2O3 and Ga2O3 have also been obtained. The method is scalable to larger substrates, and is promising as a low temperature technique for coating dielectric substrates, including flexible polymers.

Original languageEnglish
Pages (from-to)5905-5911
Number of pages7
JournalThin Solid Films
Volume518
Issue number21
DOIs
Publication statusPublished - 2010 Aug 31

Fingerprint

Microwave irradiation
Oxide films
oxide films
coatings
microwaves
Coatings
irradiation
Substrates
Polymers
Metals
polymers
Thin films
thin films
metal oxides
coating
Oxides
Sol-gels
gels
Nanostructures
glass

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

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Microwave irradiation-assisted method for the deposition of adherent oxide films on semiconducting and dielectric substrates. / Sanjaya, Brahma; Shivashankar, S. A.

In: Thin Solid Films, Vol. 518, No. 21, 31.08.2010, p. 5905-5911.

Research output: Contribution to journalArticle

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