Miniature conical transducer realized by excimer laser micro-machining technique

Yung-Chun Lee, Shi Hoa Kuo

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

This paper presents the fabrication and characterization of a miniature conical transducer that can be used as an acoustic emission sensor for localized measurements. The development of the miniature conical transducer is based on the commercial NBS conical transducer and the micro-fabrication capability of an excimer laser. The conical PZT element, which is the key component in the transducer, is fabricated by an excimer laser micro-machining workstation with a specially designed laser mask and a new work piece rotation machining technique. Small conical piezoelectric elements with end surface around 200 μm in diameter are directly fabricated out of a polarized PZT ceramic plate. The miniature conical transducer is then constructed. Standard acoustic emission measurements are carried out to characterize the performance of the transducer. Very good results are observed which indicate that the miniature conical transducer can be successfully used for measuring high-frequency dynamic surface motion.

Original languageEnglish
Pages (from-to)57-62
Number of pages6
JournalSensors and Actuators, A: Physical
Volume93
Issue number1
DOIs
Publication statusPublished - 2001 Aug 25

Fingerprint

Excimer lasers
machining
excimer lasers
Transducers
Machining
transducers
acoustic emission
Acoustic emissions
fabrication
Microfabrication
workstations
Masks
masks
ceramics
Fabrication
Lasers
sensors
Sensors
lasers

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

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Miniature conical transducer realized by excimer laser micro-machining technique. / Lee, Yung-Chun; Kuo, Shi Hoa.

In: Sensors and Actuators, A: Physical, Vol. 93, No. 1, 25.08.2001, p. 57-62.

Research output: Contribution to journalArticle

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