Modeling and analysis for an equipment manager of the manufacturing execution system in semiconductor packaging factories

Fan Tien Cheng, Tsung Liang Kuo, Chengche Feng

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

The Equipment Manager plays one of the major roles in a Manufacturing Execution System (MES). It is the communication bridge between the components of MES and the equipment. The soul of an Equipment Manager is its control algorithm. The purpose of this paper is to develop the control algorithm of an Equipment Manager. The domain knowledge and requirements are collected from a real semiconductor packaging factory. By using the IDEF0 methodology and the system state diagrams, the functional model and the dynamic model of the control algorithm are built. Then, the control algorithm is translated into the Petri-net model. This allows the qualitative and quantitative analysis of the system. The Petri-net model of the Equipment Manager is included into the MES Petri-net model. As such, the performance of an Equipment Manager in the MES environment can be evaluated. These evaluation results are good references for design and decision making. Finally, the proper control algorithm is converted into the application program of the Equipment Manager.

Original languageEnglish
Pages (from-to)469-474
Number of pages6
JournalProceedings of the IEEE International Conference on Systems, Man and Cybernetics
Volume1
Publication statusPublished - 1998 Dec 1
EventProceedings of the 1998 IEEE International Conference on Systems, Man, and Cybernetics. Part 1 (of 5) - San Diego, CA, USA
Duration: 1998 Oct 111998 Oct 14

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Hardware and Architecture

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