Modeling and analysis of equipment managers in manufacturing execution systems for semiconductor packaging

Fan Tien Cheng; Haw Ching Yang; Tsung Liang Kuo; Chengche Feng; Mu Der Jeng

doi:10.1109/3477.875451

Modeling and analysis of equipment managers in manufacturing execution systems for semiconductor packaging

Fan Tien Cheng, Haw Ching Yang, Tsung Liang Kuo, Chengche Feng, Mu Der Jeng

Institute of Manufacturing Information and Systems

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

Equipment Managers (EMs) play a major role in a Manufacturing Execution System (MES). They serve as the communication bridge between the components of an MES and the equipment. The purpose of this paper is to propose a novel methodology for developing analytical and simulation models for the EM such that the validity and performance of the EM can be evaluated. Domain knowledge and requirements are collected from a real semiconductor packaging factory. By using IDEFO and state diagrams, a static functional model and a dynamic state model of the EM are built. Next, these two models are translated into a Petri net model. This allows qualitative and quantitative analyses of the system. The EM net model is then expanded into the MES net model. Therefore, the performance of an EM in the MES environment can be evaluated. These evaluation results are good references for design and decision making.

Original language	English
Pages (from-to)	772-782
Number of pages	11
Journal	IEEE Transactions on Systems, Man, and Cybernetics, Part B: Cybernetics
Volume	30
Issue number	5
DOIs	https://doi.org/10.1109/3477.875451
Publication status	Published - 2000 Oct

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Software
Information Systems
Human-Computer Interaction
Computer Science Applications
Electrical and Electronic Engineering

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10.1109/3477.875451

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title = "Modeling and analysis of equipment managers in manufacturing execution systems for semiconductor packaging",

abstract = "Equipment Managers (EMs) play a major role in a Manufacturing Execution System (MES). They serve as the communication bridge between the components of an MES and the equipment. The purpose of this paper is to propose a novel methodology for developing analytical and simulation models for the EM such that the validity and performance of the EM can be evaluated. Domain knowledge and requirements are collected from a real semiconductor packaging factory. By using IDEFO and state diagrams, a static functional model and a dynamic state model of the EM are built. Next, these two models are translated into a Petri net model. This allows qualitative and quantitative analyses of the system. The EM net model is then expanded into the MES net model. Therefore, the performance of an EM in the MES environment can be evaluated. These evaluation results are good references for design and decision making.",

author = "Cheng, {Fan Tien} and Yang, {Haw Ching} and Kuo, {Tsung Liang} and Chengche Feng and Jeng, {Mu Der}",

note = "Funding Information: Manuscript received July 14, 1999; revised June 19, 2000. This work was supported by the National Science Council, R.O.C., under Contracts NSC-89-2212-E-006-042 and NSC 89-2622-E-006-002. This paper was recommended by Associate Editors M. A. Jafari and M. Zhou. F.-T. Cheng and H.-C. Yang are with the Institute of Manufacturing Engineering, National Cheng Kung University, Tainan 70101, Taiwan, R.O.C. T.-L. Kuo is with the IBM Taiwan Corporation, Hsinchu 300, Taiwan, R.O.C. C. Feng is with the Pharos Science and Application, Inc., Torrance, CA 90505 USA. M. Jeng is with the Department of Electrical Engineering, National Taiwan Ocean University, Keelung, Taiwan 70101, R.O.C. Publisher Item Identifier S 1083-4419(00)08296-0.",

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PY - 2000/10

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Modeling and analysis of equipment managers in manufacturing execution systems for semiconductor packaging

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