Modeling and characterization of micromachined bi-directional electro-thermal vibromotors

Wen Pin Shih, Minfan Pai, Yu Yun Lin, Chung Yuen Hui, Norman C. Tien

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The motion of a micromachined bi-directional electro-thermal vibromotor (BETV) is analyzed using an impact model which takes into account of friction and contact, as well as the compliance of the slider and the impact head. This model is shown to address several important issues on the reliable usage of BETV. These include (a) how to achieve the push or pull mode (b) avoiding multiple impacts in one actuation cycle (c) the existence of periodic solution with the same period as the thermal actuator. To test our theory, we fabricated and conducted experiments on several BETV with different geometries. Preliminary results showed good agreement between theory and experiments.

Original languageEnglish
Title of host publicationMicro-Electro-Mechanical Systems (MEMS) - 2003
PublisherAmerican Society of Mechanical Engineers
Number of pages8
ISBN (Print)0791837211, 9780791837214
Publication statusPublished - 2003
Event2003 ASME International Mechanical Engineering Congress - Washington, DC, United States
Duration: 2003 Nov 152003 Nov 21

Publication series

NameAmerican Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)


Other2003 ASME International Mechanical Engineering Congress
Country/TerritoryUnited States
CityWashington, DC

All Science Journal Classification (ASJC) codes

  • Engineering(all)


Dive into the research topics of 'Modeling and characterization of micromachined bi-directional electro-thermal vibromotors'. Together they form a unique fingerprint.

Cite this