Modeling and characterization of micromachined bi-directional electro-thermal vibromotors

Wen Pin Shih; Minfan Pai; Yu Yun Lin; Chung Yuen Hui; Norman C. Tien

doi:10.1115/imece2003-41498

Modeling and characterization of micromachined bi-directional electro-thermal vibromotors

Wen Pin Shih, Minfan Pai, Yu Yun Lin, Chung Yuen Hui, Norman C. Tien

Department of Civil Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The motion of a micromachined bi-directional electro-thermal vibromotor (BETV) is analyzed using an impact model which takes into account of friction and contact, as well as the compliance of the slider and the impact head. This model is shown to address several important issues on the reliable usage of BETV. These include (a) how to achieve the push or pull mode (b) avoiding multiple impacts in one actuation cycle (c) the existence of periodic solution with the same period as the thermal actuator. To test our theory, we fabricated and conducted experiments on several BETV with different geometries. Preliminary results showed good agreement between theory and experiments.

Original language	English
Title of host publication	Micro-Electro-Mechanical Systems (MEMS) - 2003
Publisher	American Society of Mechanical Engineers
Pages	709-716
Number of pages	8
ISBN (Print)	0791837211, 9780791837214
DOIs	https://doi.org/10.1115/imece2003-41498
Publication status	Published - 2003
Event	2003 ASME International Mechanical Engineering Congress - Washington, DC, United States Duration: 2003 Nov 15 → 2003 Nov 21

Publication series

Name	American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)
Volume	5

Other

Other	2003 ASME International Mechanical Engineering Congress
Country/Territory	United States
City	Washington, DC
Period	03-11-15 → 03-11-21

All Science Journal Classification (ASJC) codes

General Engineering

Access to Document

10.1115/imece2003-41498

Cite this

Shih, W. P., Pai, M., Lin, Y. Y., Hui, C. Y., & Tien, N. C. (2003). Modeling and characterization of micromachined bi-directional electro-thermal vibromotors. In Micro-Electro-Mechanical Systems (MEMS) - 2003 (pp. 709-716). (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS); Vol. 5). American Society of Mechanical Engineers. https://doi.org/10.1115/imece2003-41498

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title = "Modeling and characterization of micromachined bi-directional electro-thermal vibromotors",

abstract = "The motion of a micromachined bi-directional electro-thermal vibromotor (BETV) is analyzed using an impact model which takes into account of friction and contact, as well as the compliance of the slider and the impact head. This model is shown to address several important issues on the reliable usage of BETV. These include (a) how to achieve the push or pull mode (b) avoiding multiple impacts in one actuation cycle (c) the existence of periodic solution with the same period as the thermal actuator. To test our theory, we fabricated and conducted experiments on several BETV with different geometries. Preliminary results showed good agreement between theory and experiments.",

author = "Shih, {Wen Pin} and Minfan Pai and Lin, {Yu Yun} and Hui, {Chung Yuen} and Tien, {Norman C.}",

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doi = "10.1115/imece2003-41498",

language = "English",

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series = "American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)",

publisher = "American Society of Mechanical Engineers",

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note = "2003 ASME International Mechanical Engineering Congress ; Conference date: 15-11-2003 Through 21-11-2003",

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Shih, WP, Pai, M, Lin, YY, Hui, CY & Tien, NC 2003, Modeling and characterization of micromachined bi-directional electro-thermal vibromotors. in Micro-Electro-Mechanical Systems (MEMS) - 2003. American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS), vol. 5, American Society of Mechanical Engineers, pp. 709-716, 2003 ASME International Mechanical Engineering Congress, Washington, DC, United States, 03-11-15. https://doi.org/10.1115/imece2003-41498

Modeling and characterization of micromachined bi-directional electro-thermal vibromotors. / Shih, Wen Pin; Pai, Minfan; Lin, Yu Yun et al.
Micro-Electro-Mechanical Systems (MEMS) - 2003. American Society of Mechanical Engineers, 2003. p. 709-716 (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS); Vol. 5).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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T1 - Modeling and characterization of micromachined bi-directional electro-thermal vibromotors

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AB - The motion of a micromachined bi-directional electro-thermal vibromotor (BETV) is analyzed using an impact model which takes into account of friction and contact, as well as the compliance of the slider and the impact head. This model is shown to address several important issues on the reliable usage of BETV. These include (a) how to achieve the push or pull mode (b) avoiding multiple impacts in one actuation cycle (c) the existence of periodic solution with the same period as the thermal actuator. To test our theory, we fabricated and conducted experiments on several BETV with different geometries. Preliminary results showed good agreement between theory and experiments.

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Shih WP, Pai M, Lin YY, Hui CY, Tien NC. Modeling and characterization of micromachined bi-directional electro-thermal vibromotors. In Micro-Electro-Mechanical Systems (MEMS) - 2003. American Society of Mechanical Engineers. 2003. p. 709-716. (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)). doi: 10.1115/imece2003-41498

Modeling and characterization of micromachined bi-directional electro-thermal vibromotors

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