Modeling and positioning control of a ball screw driven stage

M. J. Jang, K. C. Lin, C. L. Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

The demand for high precision stages has received great attention due to the progress of nanotechnology in recent years. In the ball-screw-driven systems, the friction behavior dominates the resulting performance and is usually known as the stick-slip phenomenon. In this paper, friction models are introduced to describe the dynamic behavior of a conventional ball-screw-driven x-y stage. Two sets of controllers corresponding to the static and the dynamic friction models are proposed based on the integral type sliding mode control law. Experimental results demonstrate that the system achieves high-precision (10nm) and long-range (10cm) positioning task.

Original languageEnglish
Title of host publicationConference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control
Pages943-948
Number of pages6
Publication statusPublished - 2004 Jun 28
EventConference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control - Taipei, Taiwan
Duration: 2004 Mar 212004 Mar 23

Publication series

NameConference Proceeding - IEEE International Conference on Networking, Sensing and Control
Volume2

Other

OtherConference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control
CountryTaiwan
CityTaipei
Period04-03-2104-03-23

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Fingerprint Dive into the research topics of 'Modeling and positioning control of a ball screw driven stage'. Together they form a unique fingerprint.

Cite this