Modeling and positioning control of a ball screw driven stage

M. J. Jang; K. C. Lin; C. L. Chen

Modeling and positioning control of a ball screw driven stage

M. J. Jang, K. C. Lin, C. L. Chen

Department of Aeronautics and Astronautics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

11 Citations (Scopus)

Abstract

The demand for high precision stages has received great attention due to the progress of nanotechnology in recent years. In the ball-screw-driven systems, the friction behavior dominates the resulting performance and is usually known as the stick-slip phenomenon. In this paper, friction models are introduced to describe the dynamic behavior of a conventional ball-screw-driven x-y stage. Two sets of controllers corresponding to the static and the dynamic friction models are proposed based on the integral type sliding mode control law. Experimental results demonstrate that the system achieves high-precision (10nm) and long-range (10cm) positioning task.

Original language	English
Title of host publication	Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control
Pages	943-948
Number of pages	6
Publication status	Published - 2004
Event	Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control - Taipei, Taiwan Duration: 2004 Mar 21 → 2004 Mar 23

Publication series

Name	Conference Proceeding - IEEE International Conference on Networking, Sensing and Control
Volume	2

Other

Other	Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control
Country/Territory	Taiwan
City	Taipei
Period	04-03-21 → 04-03-23

All Science Journal Classification (ASJC) codes

General Engineering

Cite this

@inproceedings{73511e2c252b43a18b1fe2cf17ccb9c4,

title = "Modeling and positioning control of a ball screw driven stage",

abstract = "The demand for high precision stages has received great attention due to the progress of nanotechnology in recent years. In the ball-screw-driven systems, the friction behavior dominates the resulting performance and is usually known as the stick-slip phenomenon. In this paper, friction models are introduced to describe the dynamic behavior of a conventional ball-screw-driven x-y stage. Two sets of controllers corresponding to the static and the dynamic friction models are proposed based on the integral type sliding mode control law. Experimental results demonstrate that the system achieves high-precision (10nm) and long-range (10cm) positioning task.",

author = "Jang, {M. J.} and Lin, {K. C.} and Chen, {C. L.}",

year = "2004",

language = "English",

isbn = "0780381939",

series = "Conference Proceeding - IEEE International Conference on Networking, Sensing and Control",

pages = "943--948",

booktitle = "Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control",

note = "Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control ; Conference date: 21-03-2004 Through 23-03-2004",

}

Jang, MJ, Lin, KC & Chen, CL 2004, Modeling and positioning control of a ball screw driven stage. in Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control. Conference Proceeding - IEEE International Conference on Networking, Sensing and Control, vol. 2, pp. 943-948, Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control, Taipei, Taiwan, 04-03-21.

Modeling and positioning control of a ball screw driven stage. / Jang, M. J.; Lin, K. C.; Chen, C. L.
Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control. 2004. p. 943-948 (Conference Proceeding - IEEE International Conference on Networking, Sensing and Control; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Modeling and positioning control of a ball screw driven stage

AU - Jang, M. J.

AU - Lin, K. C.

AU - Chen, C. L.

PY - 2004

Y1 - 2004

N2 - The demand for high precision stages has received great attention due to the progress of nanotechnology in recent years. In the ball-screw-driven systems, the friction behavior dominates the resulting performance and is usually known as the stick-slip phenomenon. In this paper, friction models are introduced to describe the dynamic behavior of a conventional ball-screw-driven x-y stage. Two sets of controllers corresponding to the static and the dynamic friction models are proposed based on the integral type sliding mode control law. Experimental results demonstrate that the system achieves high-precision (10nm) and long-range (10cm) positioning task.

AB - The demand for high precision stages has received great attention due to the progress of nanotechnology in recent years. In the ball-screw-driven systems, the friction behavior dominates the resulting performance and is usually known as the stick-slip phenomenon. In this paper, friction models are introduced to describe the dynamic behavior of a conventional ball-screw-driven x-y stage. Two sets of controllers corresponding to the static and the dynamic friction models are proposed based on the integral type sliding mode control law. Experimental results demonstrate that the system achieves high-precision (10nm) and long-range (10cm) positioning task.

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M3 - Conference contribution

AN - SCOPUS:2942633108

SN - 0780381939

T3 - Conference Proceeding - IEEE International Conference on Networking, Sensing and Control

SP - 943

EP - 948

BT - Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control

T2 - Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control

Y2 - 21 March 2004 through 23 March 2004

ER -

Modeling and positioning control of a ball screw driven stage

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All Science Journal Classification (ASJC) codes

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