Modeling and positioning control of a ball screw driven stage

M. J. Jang, K. C. Lin, Chieh-Li Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

The demand for high precision stages has received great attention due to the progress of nanotechnology in recent years. In the ball-screw-driven systems, the friction behavior dominates the resulting performance and is usually known as the stick-slip phenomenon. In this paper, friction models are introduced to describe the dynamic behavior of a conventional ball-screw-driven x-y stage. Two sets of controllers corresponding to the static and the dynamic friction models are proposed based on the integral type sliding mode control law. Experimental results demonstrate that the system achieves high-precision (10nm) and long-range (10cm) positioning task.

Original languageEnglish
Title of host publicationConference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control
Pages943-948
Number of pages6
Volume2
Publication statusPublished - 2004
EventConference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control - Taipei, Taiwan
Duration: 2004 Mar 212004 Mar 23

Other

OtherConference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control
CountryTaiwan
CityTaipei
Period04-03-2104-03-23

Fingerprint

Ball screws
Friction
Stick-slip
Sliding mode control
Nanotechnology
Controllers

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Jang, M. J., Lin, K. C., & Chen, C-L. (2004). Modeling and positioning control of a ball screw driven stage. In Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control (Vol. 2, pp. 943-948)
Jang, M. J. ; Lin, K. C. ; Chen, Chieh-Li. / Modeling and positioning control of a ball screw driven stage. Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control. Vol. 2 2004. pp. 943-948
@inproceedings{73511e2c252b43a18b1fe2cf17ccb9c4,
title = "Modeling and positioning control of a ball screw driven stage",
abstract = "The demand for high precision stages has received great attention due to the progress of nanotechnology in recent years. In the ball-screw-driven systems, the friction behavior dominates the resulting performance and is usually known as the stick-slip phenomenon. In this paper, friction models are introduced to describe the dynamic behavior of a conventional ball-screw-driven x-y stage. Two sets of controllers corresponding to the static and the dynamic friction models are proposed based on the integral type sliding mode control law. Experimental results demonstrate that the system achieves high-precision (10nm) and long-range (10cm) positioning task.",
author = "Jang, {M. J.} and Lin, {K. C.} and Chieh-Li Chen",
year = "2004",
language = "English",
isbn = "0780381939",
volume = "2",
pages = "943--948",
booktitle = "Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control",

}

Jang, MJ, Lin, KC & Chen, C-L 2004, Modeling and positioning control of a ball screw driven stage. in Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control. vol. 2, pp. 943-948, Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control, Taipei, Taiwan, 04-03-21.

Modeling and positioning control of a ball screw driven stage. / Jang, M. J.; Lin, K. C.; Chen, Chieh-Li.

Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control. Vol. 2 2004. p. 943-948.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Modeling and positioning control of a ball screw driven stage

AU - Jang, M. J.

AU - Lin, K. C.

AU - Chen, Chieh-Li

PY - 2004

Y1 - 2004

N2 - The demand for high precision stages has received great attention due to the progress of nanotechnology in recent years. In the ball-screw-driven systems, the friction behavior dominates the resulting performance and is usually known as the stick-slip phenomenon. In this paper, friction models are introduced to describe the dynamic behavior of a conventional ball-screw-driven x-y stage. Two sets of controllers corresponding to the static and the dynamic friction models are proposed based on the integral type sliding mode control law. Experimental results demonstrate that the system achieves high-precision (10nm) and long-range (10cm) positioning task.

AB - The demand for high precision stages has received great attention due to the progress of nanotechnology in recent years. In the ball-screw-driven systems, the friction behavior dominates the resulting performance and is usually known as the stick-slip phenomenon. In this paper, friction models are introduced to describe the dynamic behavior of a conventional ball-screw-driven x-y stage. Two sets of controllers corresponding to the static and the dynamic friction models are proposed based on the integral type sliding mode control law. Experimental results demonstrate that the system achieves high-precision (10nm) and long-range (10cm) positioning task.

UR - http://www.scopus.com/inward/record.url?scp=2942633108&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2942633108&partnerID=8YFLogxK

M3 - Conference contribution

SN - 0780381939

VL - 2

SP - 943

EP - 948

BT - Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control

ER -

Jang MJ, Lin KC, Chen C-L. Modeling and positioning control of a ball screw driven stage. In Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control. Vol. 2. 2004. p. 943-948