Modeling of heat transfer for laser-assisted direct nano imprint processing

Fei Bin Hsiao, Di Bao Wang, Chun Ping Jen, Hui Ju Hsu, Cheng Hsin Chuang, Yung-Chun Lee, Chuan-Pu Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The melting duration and molten depth are key information for Laser-Assisted Direct Imprinting, which raises issues about the melting & solidification induced by excimer-pulse-laser irradiating through unilaterally transparent binary materials. Considering the size-effect on thermal conductivity and phase-change of irradiated material, the thermal-contact resistance is taken into account to simulate and predict the melting behavior for this process. Results in this study indicate that the laser-annealing case as well as the perfect-contact case provides the upper-bound and the lower-bound values for the physical quantities involved in this process even without the detail information of the changing values of thermal-contact resistance.

Original languageEnglish
Title of host publication2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
Pages747-751
Number of pages5
Publication statusPublished - 2005 Dec 1
Event2005 IEEE International Conference on Robotics and Biomimetics, ROBIO - Shatin, N.T., China
Duration: 2005 Jul 52005 Jul 9

Publication series

Name2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
Volume2005

Other

Other2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
CountryChina
CityShatin, N.T.
Period05-07-0505-07-09

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All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Hsiao, F. B., Wang, D. B., Jen, C. P., Hsu, H. J., Chuang, C. H., Lee, Y-C., & Liu, C-P. (2005). Modeling of heat transfer for laser-assisted direct nano imprint processing. In 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO (pp. 747-751). [1708840] (2005 IEEE International Conference on Robotics and Biomimetics, ROBIO; Vol. 2005).