Modified BVD model of PZT actuator using high-voltage square pulse method for micropumps

Yao M. Chou, Ming K. Chen, Ling-Sheng Jang

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The field of micro-electro-mechanical systems and microfabrication has produced micro-total-analysis systems, which are widely used in medicine, diagnostics, and biological and chemical research. For the development of high precision drug delivery systems, micropumps with a lead zirconate titanate (PZT) actuator, which has a fast response time and high resolution, are most likely to be applied in implementations. To improve the performance of PZT micropumps utilized in the microfluidics field, suitable models are required to enable the optimization of the PZT actuator driving circuits. This study proposes a modified Butterworth-Van Dyke (BVD) model which consists of a BVD model in series with an electrical resistance that describes a PZT actuator driven by a square pulse with a relatively high voltage and low frequency for micropump applications. Experiments were conducted to assess parameters of the model at various voltages; they indicate that the electrical resistance is essential for modeling the PZT actuator of the micropump. The electrical model was verified using a SPICE simulation, whose numerical results were compared with the experimental data for the current response of the PZT actuator. The results show a close correlation between the simulation of the electrical model and the measurements of the PZT actuator under real operating conditions.

Original languageEnglish
Pages (from-to)727-738
Number of pages12
JournalMicrofluidics and Nanofluidics
Volume8
Issue number6
DOIs
Publication statusPublished - 2010 Jun 1

Fingerprint

high voltages
Actuators
actuators
Electric potential
pulses
Acoustic impedance
electrical resistance
Microfabrication
systems analysis
SPICE
medicine
Microfluidics
Medicine
delivery
drugs
simulation
low frequencies
optimization
Networks (circuits)
high resolution

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Condensed Matter Physics

Cite this

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abstract = "The field of micro-electro-mechanical systems and microfabrication has produced micro-total-analysis systems, which are widely used in medicine, diagnostics, and biological and chemical research. For the development of high precision drug delivery systems, micropumps with a lead zirconate titanate (PZT) actuator, which has a fast response time and high resolution, are most likely to be applied in implementations. To improve the performance of PZT micropumps utilized in the microfluidics field, suitable models are required to enable the optimization of the PZT actuator driving circuits. This study proposes a modified Butterworth-Van Dyke (BVD) model which consists of a BVD model in series with an electrical resistance that describes a PZT actuator driven by a square pulse with a relatively high voltage and low frequency for micropump applications. Experiments were conducted to assess parameters of the model at various voltages; they indicate that the electrical resistance is essential for modeling the PZT actuator of the micropump. The electrical model was verified using a SPICE simulation, whose numerical results were compared with the experimental data for the current response of the PZT actuator. The results show a close correlation between the simulation of the electrical model and the measurements of the PZT actuator under real operating conditions.",
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Modified BVD model of PZT actuator using high-voltage square pulse method for micropumps. / Chou, Yao M.; Chen, Ming K.; Jang, Ling-Sheng.

In: Microfluidics and Nanofluidics, Vol. 8, No. 6, 01.06.2010, p. 727-738.

Research output: Contribution to journalArticle

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