Molybdenum Disulfide Transistors Bearing All-2D-Material Interfaces: Device Performance Optimization and Influences of Interfaces and Passivation Layers

Che Jia Chang, Bo Hao Chen, Tzu Hsuan Chang, Shoou Jinn Chang, Shih Yen Lin

Research output: Contribution to journalArticlepeer-review

Abstract

Two-dimensional (2D) materials are only a few atomic layers thick, which means that these materials will be severely influenced by various non-2D-material interfaces after device fabrication. In addition to the crystallinity of the 2D materials, the main bottleneck of device performance may originate from these interfaces. With polycrystalline antimonene as the contact electrode and mono-layer MoS2 buffer layers on the top and bottom of the mono-layer MoS2 channel to reduce the influence from the top Al2O3 passivation and bottom SiO2 dielectric layers, optimized device performances, including a field-effect mobility of 25.70 cm2 V-1·s-1 and ON/OFF ratios >105, were achieved for MoS2 transistors that have a channel width/length of 25/5 μm, respectively. By further reducing the channel width/length to 500/660 nm, an even higher field-effect mobility of 63.80 cm2 V-1·s-1 and ON/OFF ratios >106 were achieved for the device, which were attributed to reduced carrier scattering in the polycrystalline MoS2 channel with reduced line widths. The use of 2D-material homostructures to isolate the 2D-material channel and a deposition temperature of <100 °C to fabricate the antimonene contact facilitated the fabrication of MoS2 transistors bearing all-2D-material interfaces is advantageous for practical applications.

Original languageEnglish
Pages (from-to)6384-6391
Number of pages8
JournalACS Applied Electronic Materials
Volume5
Issue number11
DOIs
Publication statusPublished - 2023 Nov 28

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Electrochemistry

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