Molybdenum-doped zinc oxide nanocomposite transparent film derived by sputtering technique

Po Tsung Hsieh, Tao Hsing Chen, Chao Yu Huang, Ji Quan Wang, Ricky Wenkuei Chuang

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


A molybdenum (Mo)-doped zinc oxide thin film is deposited on a glass substrate by a rf magnetron sputtering technique. The structural and optical characteristics of ZnO:Mo (ZMO) thin films prepared with various deposition parameters are investigated. A series of SEM images obtained reveal that the average grain size of ZMO thin films is small and uniform. Energy dispersive spectroscopy analysis also verifies that traces of Mo are present in the as-grown thin films. The thicknesses of these ZMO films ranging from 150 to 390 nm are obtained by varying pertinent sputtering parameters. The average transmittance of ZMO thin films measured is more than 80% in the visible spectrum.

Original languageEnglish
Article number043004
JournalJournal of Micro/Nanolithography, MEMS, and MOEMS
Issue number4
Publication statusPublished - 2010

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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