Monochromatic soft X-ray-induced reactions of CCl 2F 2 adsorbed on Si(111)-7 × 7 near the Si(2p) edge

S. K. Wang, W. C. Tsai, L. C. Chou, J. Chen, Y. H. Wu, T. M. He, K. S. Feng, C. R. Wen

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Continuous-time photoelectron spectroscopy (PES) and continuous-time core-level photon-stimulated desorption (PSD) spectroscopy were used to study the monochromatic soft X-ray-induced reactions of CCl 2F 2 molecules adsorbed on Si(111)-7 × 7 at 30 K (CCl 2F 2 dose = 2.0 × 10 14 molecules/cm 2, ∼ 0.75 monolayer) near the Si(2p) core level. Evolution of adsorbed CCl 2F 2 molecules was monitored by using continuous-time photoelectron spectroscopy at two photon energies of 98 and 120 eV to deduce the photolysis cross section as a function of energy. It was found that the photolysis cross sections for 98 and 120 eV photons are 1.4 × 10 - 18 and ∼ 8.0 × 10 - 18 cm 2, respectively. Sequential F + PSD spectra obtained by using continuous-time core-level photon-stimulated desorption spectroscopy in the photon energy range of 98-110 eV show the variation of their shapes with photon exposure and depict the formation of surface SiF species. The dissociation of CCl 2F 2 molecules adsorbed on Si(111)-7 × 7, irradiated by monochromatic soft X-ray in the photon energy range of 98-110 eV, is mainly due to dissociative electron attachment and indirect dipolar dissociation induced by photoelectrons emitted from the silicon surface.

Original languageEnglish
Pages (from-to)1062-1070
Number of pages9
JournalSurface Science
Volume606
Issue number13-14
DOIs
Publication statusPublished - 2012 Jul 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Monochromatic soft X-ray-induced reactions of CCl <sub>2</sub>F <sub>2</sub> adsorbed on Si(111)-7 × 7 near the Si(2p) edge'. Together they form a unique fingerprint.

Cite this