Monolithic Integrated CMOS-MEMS MOS type Gas Sensor and Novel Heater for Sensitivity and Power Consumption Enhancement

Ya Chu Lee, Shyh Wei Cheng, Yu Cheng Lin, Weileun Fang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This study designs and implements a metal-oxide semiconductors (MOS) type gas sensor in Fig. 1. The chip is implemented using TSMC 0.35μm 2P4M standard CMOS process and the sensing material is prepared by hydrothermal synthesis method. The gas concentration is detected based on the resistance change measured by the proposed sensor. Features of this study are (Fig. 1): (1) reduction of size through vertical integration of heater and ZnO-SnO2 gas-sensing films on the CMOS-MEMS structure, (2) reduction of power consumption of the gas sensor through the heater design. In applications, the gas sensor will be used for O2 concentration measurement. Measurement results show that the sensitivity of O2 concentration sensing is improved from 0.093%/% to 0.3%/% (within O2 concentration of 16-50%), and the power consumption is reduced from 477mw to 32mw by varying the heater design.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1389-1392
Number of pages4
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - 2019 Jun
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 2019 Jun 232019 Jun 27

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
CountryGermany
CityBerlin
Period19-06-2319-06-27

Fingerprint

Gas Sensor
Chemical sensors
Micro-electro-mechanical Systems
heaters
metal oxide semiconductors
Power Consumption
microelectromechanical systems
MEMS
Oxides
Semiconductors
CMOS
Electric power utilization
Enhancement
Metals
Sensing
augmentation
sensitivity
sensors
Gases
gases

All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

Cite this

Lee, Y. C., Cheng, S. W., Lin, Y. C., & Fang, W. (2019). Monolithic Integrated CMOS-MEMS MOS type Gas Sensor and Novel Heater for Sensitivity and Power Consumption Enhancement. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 1389-1392). [8808361] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808361
Lee, Ya Chu ; Cheng, Shyh Wei ; Lin, Yu Cheng ; Fang, Weileun. / Monolithic Integrated CMOS-MEMS MOS type Gas Sensor and Novel Heater for Sensitivity and Power Consumption Enhancement. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 1389-1392 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).
@inproceedings{a0f2d4356f0d40bcbd55ecf39d5339fa,
title = "Monolithic Integrated CMOS-MEMS MOS type Gas Sensor and Novel Heater for Sensitivity and Power Consumption Enhancement",
abstract = "This study designs and implements a metal-oxide semiconductors (MOS) type gas sensor in Fig. 1. The chip is implemented using TSMC 0.35μm 2P4M standard CMOS process and the sensing material is prepared by hydrothermal synthesis method. The gas concentration is detected based on the resistance change measured by the proposed sensor. Features of this study are (Fig. 1): (1) reduction of size through vertical integration of heater and ZnO-SnO2 gas-sensing films on the CMOS-MEMS structure, (2) reduction of power consumption of the gas sensor through the heater design. In applications, the gas sensor will be used for O2 concentration measurement. Measurement results show that the sensitivity of O2 concentration sensing is improved from 0.093{\%}/{\%} to 0.3{\%}/{\%} (within O2 concentration of 16-50{\%}), and the power consumption is reduced from 477mw to 32mw by varying the heater design.",
author = "Lee, {Ya Chu} and Cheng, {Shyh Wei} and Lin, {Yu Cheng} and Weileun Fang",
year = "2019",
month = "6",
doi = "10.1109/TRANSDUCERS.2019.8808361",
language = "English",
series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1389--1392",
booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
address = "United States",

}

Lee, YC, Cheng, SW, Lin, YC & Fang, W 2019, Monolithic Integrated CMOS-MEMS MOS type Gas Sensor and Novel Heater for Sensitivity and Power Consumption Enhancement. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808361, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., pp. 1389-1392, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 19-06-23. https://doi.org/10.1109/TRANSDUCERS.2019.8808361

Monolithic Integrated CMOS-MEMS MOS type Gas Sensor and Novel Heater for Sensitivity and Power Consumption Enhancement. / Lee, Ya Chu; Cheng, Shyh Wei; Lin, Yu Cheng; Fang, Weileun.

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 1389-1392 8808361 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Monolithic Integrated CMOS-MEMS MOS type Gas Sensor and Novel Heater for Sensitivity and Power Consumption Enhancement

AU - Lee, Ya Chu

AU - Cheng, Shyh Wei

AU - Lin, Yu Cheng

AU - Fang, Weileun

PY - 2019/6

Y1 - 2019/6

N2 - This study designs and implements a metal-oxide semiconductors (MOS) type gas sensor in Fig. 1. The chip is implemented using TSMC 0.35μm 2P4M standard CMOS process and the sensing material is prepared by hydrothermal synthesis method. The gas concentration is detected based on the resistance change measured by the proposed sensor. Features of this study are (Fig. 1): (1) reduction of size through vertical integration of heater and ZnO-SnO2 gas-sensing films on the CMOS-MEMS structure, (2) reduction of power consumption of the gas sensor through the heater design. In applications, the gas sensor will be used for O2 concentration measurement. Measurement results show that the sensitivity of O2 concentration sensing is improved from 0.093%/% to 0.3%/% (within O2 concentration of 16-50%), and the power consumption is reduced from 477mw to 32mw by varying the heater design.

AB - This study designs and implements a metal-oxide semiconductors (MOS) type gas sensor in Fig. 1. The chip is implemented using TSMC 0.35μm 2P4M standard CMOS process and the sensing material is prepared by hydrothermal synthesis method. The gas concentration is detected based on the resistance change measured by the proposed sensor. Features of this study are (Fig. 1): (1) reduction of size through vertical integration of heater and ZnO-SnO2 gas-sensing films on the CMOS-MEMS structure, (2) reduction of power consumption of the gas sensor through the heater design. In applications, the gas sensor will be used for O2 concentration measurement. Measurement results show that the sensitivity of O2 concentration sensing is improved from 0.093%/% to 0.3%/% (within O2 concentration of 16-50%), and the power consumption is reduced from 477mw to 32mw by varying the heater design.

UR - http://www.scopus.com/inward/record.url?scp=85071932142&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85071932142&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2019.8808361

DO - 10.1109/TRANSDUCERS.2019.8808361

M3 - Conference contribution

AN - SCOPUS:85071932142

T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

SP - 1389

EP - 1392

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Lee YC, Cheng SW, Lin YC, Fang W. Monolithic Integrated CMOS-MEMS MOS type Gas Sensor and Novel Heater for Sensitivity and Power Consumption Enhancement. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. p. 1389-1392. 8808361. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). https://doi.org/10.1109/TRANSDUCERS.2019.8808361